RF-performance of thick damascene Cu interconnect on silicon

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2004, Pages 1643-1646

  Van Noort, Wibo D ^a   Detcheverry, C ^a   Jansman, A B M ^a   Verheijden, G ^a   Bancken, P ^a   Daamen, R ^a   Nguyen, Viet ^a   Havens, R J ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Coplanar Waveguides; Copper; Damascene; Low K; Passives; Silicon; SiO2; Tiling

Indexed keywords

CHEMICAL MECHANICAL POLISHING; COPPER; DEPOSITION; ELECTRIC RESISTANCE; FREQUENCIES; ION BEAMS; SILICA; WAVEGUIDES;

DAMASCENE; LOW K; PASSIVES; TILING;

SILICON WAFERS;

EID: 4544375271     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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