High resistivity Si as a microwave substrate

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 1996, Pages 382-391

  Reyes, Adolfo C ^a   El Ghazaly, Samir M ^a   Dorn, Steve ^a   Dydyk, Michael ^a   Schroder, Dieter K ^a   Patterson, Howard ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; ELECTRIC INSULATING MATERIALS; ELECTRIC LOSSES; MICROWAVE DEVICES; Q FACTOR MEASUREMENT; QUARTZ APPLICATIONS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; WAVEGUIDES;

HIGH RESISTIVITY SILICON; MEANDER LINES; MICROWAVE SPIRAL INDUCTORS; MICROWAVE SUBSTRATES; MICROWAVE THEORY; SEMICONDUCTOR PHYSICS THEORY;

SEMICONDUCTING SILICON;

EID: 0029699455     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (20)