Signal modeling for modern interference microscopes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5457, Issue , 2004, Pages 26-34

  De Groot, P ^a   Colonna De Lega, X ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Interferometry; Microscopy; Modeling; White light

Indexed keywords

COMPUTER SIMULATION; INTERFEROMETRY; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; OPTICAL RESOLVING POWER; PIEZOELECTRIC TRANSDUCERS; SIGNAL INTERFERENCE;

CONTRAST LOCALIZATION; INTERFERENCE MICROSCOPES; SIMULATED SIGNALS; WHITE LIGHT;

SIGNAL PROCESSING;

EID: 4544358654     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.546226     Document Type: Conference Paper

References (13)

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