Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3225, Issue , 1997, Pages 44-54

  Nakano, Ken ^a   Torii, Akihiro ^b   Hane, Kazuhiro ^c   Okuma, Shigeru ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b AICHI INSTITUTE OF TECHNOLOGY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

Multi mode laser; Phase shift interferometry; Stroboscopic method; Surface acoustic wave; Surface acoustic wave device; Vibration distribution measurement

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; INTERFEROMETRY; MICROMACHINING; SEMICONDUCTOR LASERS;

MULTIMODE LASER; PHASE SHIFT INTERFEROMETRY; STROBOSCOPIC METHOD; SURFACE ACOUSTIC WAVES; VIBRATION DISTRIBUTIONS;

ACOUSTIC WAVE PROPAGATION;

EID: 10044262706     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.284553     Document Type: Conference Paper

References (29)

1. S. Sugiyama and I. Igarashi, "Mechanical sensor," Seimitsu 54(9), pp. 19-23, 1988 in Japanese].
2. T. Sashida, "TVial construction and operation of an ultrasonic vibration driven motor-Theoretical and experimental investigation of its performances-," Oyo Buturi 51(6), pp. 713-720, 1982 in Japanese].
3. A. Kumada, "A piezoelectric ultrasonic motor," Jpn. J. Appl. Phys., Suppi 24(2), pp. 739-741, 1985.
4. M. Kurosawa and S. Ueha, "Efficiency of ultrasonic motor using traveling wave," Nippon Onkyou Gakkai-shi 44(1), pp. 40-46, 1988 in Japanese].
5. A. J. Slobodnik, Jr. "Surface acoustic waves and saw materials," Proc. of the IEEE 64(5), pp. 581-595, 1976.
6. D. L. T. Bell, Jr. and R. CM. Li, "Surface-Acoustic-wave resonators," Proc. of the IEEE 64(5), pp. 711-721, 1976.
7. P. Defranould and C. Maerfeld, "A saw plannar piezoelectric convolver," Proc. of the IEEE 64(5), pp. 748-751, 1976.
8. K. Yoneda, M. Tawata and S. Hattori, "Laser probe for surface acoustic wave measurements," Jpn. J. Appl. Phys., Suppl. 20(3), pp. 61-64, 1981.
9. D. Royer and E. Dieulesaint, "Optical probing of the mechanical impulse response of a transducer," Appl. Phys. Lett. 49(17), pp. 1056-1058, 1986.
10. Y. Hirose, T. Abe, H. Komai and Y. Tsuzuki, "Optical fibre vibration sensing system," Trans. IEICE E70(3), pp. 195-202, 1987.
11. Y. Hirose, M. Kitajima and Y. Tsuzuki, "Method of measuring vhf elastic vibration modes by optical sensing," Jpn. J. Appl. Phys., Suppl. 28(1), pp. 91-93, 1989.
12. N. Umeda, "Observation of elliptical motion in the tortion coupler of ultrasonic motor using optical heterodyne interferometer," Trans. IEICE J70-C(7), pp. 1038-1043, 1987 in Japanese].
13. K. Iijima, Y. Tsuzuki, Y. Hirose and M. Akiyama, "Laser interferometric measurement of the vibration displacements of a plano-convex at-cut quartz crystal resonator," Proc. of the IEEE 64(3), pp. 386-387, 1976.
14. D. V. Roshchupkin, Th. Fournier, M. Brunei, O. A. Plotitsyna and N. G. Sorokin, "Scanning electron microscopy observation of excitation of the surface acoustic waves by the regular domain structures in the linbo3 crystals," Appl. Phys. Lett 60(19), pp. 2330-2331, 1992.
15. S. Shiokawa, T. Moriizumi and T. Yasuda, "Study of saw propagation characteristics by frequency-Translated holography," Appl. Phys. Lett. 27(8), pp. 419-420, 1975.
16. Y. Togami and T. Chiba, "Observation of bulk waves and surface waves through side planes of several cuts of linbo3 saw devices," J. Appl. Phys. 49(6), pp. 3587-3589, 1978.
17. M. Kujawinska and D. Robinson, "Multichannel phase-stepped holographic interferometry," Appl. Opt 27(2), pp. 312-320, 1988.
18. K. Stetson and W. Brohinsky, "Fringe-shifting technique for numerical analysis of time-Average holograms of vibrating objects," J. Opt. Soc. Am. 5(9), pp. 1472-1476, 1988.
19. M. Hajduk and D. Mewes, "The measurement of transient deformation by double pulsed interferometry, a method for nondestructive testing," Nuci Eng. Des. 119(2/3), pp. 467-473, 1990.
20. K. Creath, "Phase-measurement interferometry," in Progress in Optics, E. Wolf, ed., vol. 26, pp. 349-393, Elsevier, Amsterdam, 1988.
21. J. Greivenkamp and J. Bruning, "Phase shifting interferometry," in Optical Shop Testing, Second Edition, D. Malacara, ed., pp. 501-598, John Wiley & Sons. Inc., 1992.
22. J. H. Bruning, D.R. Herriot, J. E. Gallagher, D. P. Rosenfeld, A. D. White and D. J. Brangaccio, "Digital wavefront measuring interferometer for testing optical surfaces and lenses," Appl. Opt. 13(11), pp. 2693-2703, 1974.
23. M. Takeda, H. Ina, and S. Kobayashi, "Fourier-Transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72(1), pp. 156-160, 1982.
24. C. Roddier and F. Roddier, "Interferogram analysis using fourier transform techniques," Appl. Opt. 26(9), pp. 1668-1673, 1987.
25. O. Y. Kwon, D. M. Shough and R. A. Williams, "Stroboscopic phase-shifting interferometry," Opt. Lett. 12(11), pp. 855-857, 1987.
26. P. Wiznowich, "Phase shifting interferometry in the presence of vibration: A new algorithm and system," Appl. Opt. 29(22), pp. 3271-3279, 1990.
27. D. J. Anderson, J. D. Valera and J.D.C. Jones, "Electronic speckle pattern interferometry using diode laser stroboscopic illumination," Meas. Sci. Technol. 4(9), pp. 982-987, 1993.
28. K. Nakano, H. Yoshida, K. Hane, S. Okuma and T. Eguchi, "Fringe scanning interferometric imaging of small vibration using pulsed laser diode," Trans, of SICE 31(4), pp. 454-460, 1995 in Japanese].
29. K. Nakano, G. Nishizawa, K. Hane, S. Okuma and T. Eguchi, "Vibration measurement of ultrasonic motor using stroboscopic interferometry," Trans, of JSME (762(598), pp. 2237-2243, 1996 in Japanese].