Application of X-ray scattering technique to the study of supersmooth surfaces

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 530, Issue 3, 2004, Pages 575-595

  Asadchikov, V E ^a   Kozhevnikov, I V ^b   Krivonosov, Yu S ^a   Mercier, R ^c   Metzger, T H ^d   Morawe, C ^d   Ziegler, E ^d  

^a SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^b LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

^c INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

^d EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Surface roughness; X ray scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; CORRELATION METHODS; RANDOM PROCESSES; SCATTERING; SUBSTRATES; SYNCHROTRON RADIATION; X RAY ANALYSIS;

SUPERSMOOTH SURFACES; X-RAY RADIATION; X-RAY SCATTERING;

SURFACE ROUGHNESS;

EID: 4544343931     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2004.04.216     Document Type: Article

References (31)

1. V. Holy, U. Pietsch, T. Baumbach, High Resolution X-Ray Scattering from Thin Films and Multilayers, in: Springer Tracts in Modern Physics, Vol. 149, Springer, Berlin, 1999.
2. M. Tolan, X-Ray Scattering from Soft-Matter Thin Films, in: Springer Tracts in Modern Physics, Vol. 148, Springer, Berlin, 1999.
3. I.A. Artioukov, V.E. Asadchikov, I.V. Kozhevnikov, J. X-Ray Sci. Technol. 6 (1996) 223.
4. B.M. Alaudinov, I.A. Artyukov, V.E. Asadchikov, A.Yu. Karabekov, I.V. Kozhevnikov, Crystallogr. Rep. 39 (1994) 540.
5. S.K. Sinha, E.B. Sirota, S. Garoff, H.B. Stanley, Phys. Rev. B 38 (1988) 2297.
6. R. Pynn, Phys. Rev. B 45 (1992) 602.
7. W. Weber, B. Lengeler, Phys. Rev. B 46 (1992) 7953.
8. G. Palazantzas, J. Krim, Phys. Rev. B 48 (1993) 2873.
9. S.K. Sinha, J. Phys. III France 4 (1994) 1543.
10. D.K.G. de Boer, Phys. Rev. B 49 (1994) 5817.
11. J.C. Stover, Optical Scattering: Measurement and Analysis, MCGraw-Hill, New York, 1990.
12. J.M. Bennett, Surface Finish and its Measurement, OSA, Washington, 1992.
13. A.V. Andreev, Sov. Phys. Usp. 28 (1985) 70.
14. A.V. Vinogradov, N.N. Zorev, I.V. Kozhevnikov, I.G. Yakushkin, Sov. Phys. JETP 62 (1985) 1225.
15. E.L. Church, Appl. Opt. 27 (1988) 8.
16. A.V. Vinogradov, N.N. Zorev, I.V. Kozhevnikov, S.I. Sagitov, A.G. Tur'yanskii, Sov. Phys. JETP 67 (1988) 1631.
17. A.V. Vinogradov, I.A. Artyukov, S.S. Borisova, N.N. Zorev, I.V. Kozhevnikov, I.F. Mikhailov, S.I. Sagitov, A.I. Fedorenko, Proc. SPIE 1140 (1989) 490.
18. I.V. Kozhevnikov, M.V. Pyatakhin, J. X-Ray Sci. Technol. 8 (2000) 253.
19. V.E. Asadchikov, A. Duparré, S. Jakobs, A.Yu. Karabekov, I.V. Kozhevnikov, Yu.S. Krivonosov, Appl. Opt. 38 (1999) 684.
20. V.E. Asadchikov, E.E. Andreev, A.V. Vinogradov, A.Yu. Karabekov, I.V. Kozhevnikov, Yu.S. Krivonosov, A.A. Postnov, S.I. Sagitov, Surf. Invest. 14 (1999) 887.
21. I.V. Kozhevnikov, V.E. Asadchikov, I.N. Bukreeva, A. Duparré, Yu.S. Krivonosov, C. Morawe, V.I. Ostashev, M.V. Pyatakhin, E. Ziegler, Proc. SPIE 4099 (2000) 267.
22. I.V. Kozhevnikov, V.E. Asadchikov, A. Duparré, O.N. Gilev, N.A. Havronin, Yu.S. Krivonosov, V.I. Ostashev, J. Steinert, Proc. SPIE 3739 (1999) 348.
23. E.L. Church, P.Z. Takacs, Proc. SPIE 1530 (1991) 71.
24. D.G. Stearns, Appl. Phys. Lett. 62 (1993) 1745.
25. D.G. Stearns, E.M. Gullikson, Physica B 283 (2000) 84.
26. S. Jakobs, A. Duparré, H. Truckenbrodt, Appl. Opt. 37 (1998) 1180.
27. M.J. Capitan, D. Thiaudiere, L. Goirand, R. Taffut, S. Lequien, Physica B 283 (2000) 256.
28. V.E. Asadchikov, I.N. Bukreeva, A. Duparré, I.V. Kozhevnikov, Y.S. Krivonosov, C. Morawe, M.V. Pyatakhin, A.V. Vinogradov, E. Ziegler, Proc. SPIE 4449 (2001) 253.
29. W.M. Mullins, J. Appl. Phys. 30 (1959) 77.
30. I.V. Kozhevnikov, Nucl. Instr. and Meth. A 508 (2003) 519.
31. J.A. Ogilvy, Theory of Wave Scattering from Random Rough Surfaces, IOP Publishing, Bristol, 1991.