X-ray study of the roughness of surfaces and interfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4099, Issue 1, 2000, Pages 267-278

  Kozhevnikov, Igor V ^a   Asadchikov, Victor E ^b   Bukreeva, Inna N ^a   Duparré, Angela ^c   Krivonosov, Yury S ^b   Morawe, Christian ^d   Ostashev, Vladimir I ^e   Pyatakhin, Mikhail V ^a   Ziegler, Eric ^d  

^a LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

^b SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^d EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^e INSTITUTE OF TECHNICAL PHYSICS   (Russian Federation)

Author keywords

Atomic force microscopy; Multilayer structure; Roughness; Thin film; X ray scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFACES (MATERIALS); MULTILAYERS; THIN FILMS; X RAY SCATTERING;

FILM INTERFACES;

SURFACE ROUGHNESS;

EID: 0034538533     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.405809     Document Type: Article

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