Nonspecular scattering from extreme ultraviolet multilayer coatings

Physica B: Condensed Matter

Volumn 283, Issue 1-3, 2000, Pages 84-91

  Stearns, D G ^a   Gullikson, E M ^b  

^a OS Associates   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CONTINUUM MECHANICS; DEPOSITION; FILM GROWTH; INTERFACES (MATERIALS); MATHEMATICAL MODELS; OPTICAL MULTILAYERS; PHOTOLITHOGRAPHY; SUBSTRATES; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

CONTINUUM GROWTH MODEL; DISTORTED WAVE BORN APPROXIMATION (DWBA) THEORY; ULTRAVIOLET LITHOGRAPHY;

OPTICAL COATINGS;

EID: 0033750571     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(99)01897-9     Document Type: Article

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