Preparation and characterization of Al doped ZnO thin films by PLD

Superlattices and Microstructures

Volumn 44, Issue 1, 2008, Pages 127-135

  Venkatachalam, S ^a   Iida, Y ^a   Kanno, Yoshinori ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

AFM; EDAX; Hall; Optical transmittance; PLD; Raman; SEM; XRD; ZnO films

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; CONCENTRATION (PROCESS); DOPING (ADDITIVES); ELECTRIC PROPERTIES; ENERGY DISPERSIVE SPECTROSCOPY; OPACITY; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

DOPING CONCENTRATION; OPTICAL TRANSMITTANCE SPECTRA;

THIN FILMS;

EID: 44949109951     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2008.03.006     Document Type: Article

References (16)

1. Zhao J.H., Wang A.H., Green M.A., and Ferrazza F. Appl. Phys. Lett. 73 (1998) 1991
2. Hupkes J., Rech B., Calnan S., Kluth O., Zastrow U., Siekmann H., and Wuttig M. Thin Solid Films 502 (2006) 286-291
3. Chen X., Guan W., Fang G., and Zhao X.Z. Appl. Surf. Sci. 252 (2005) 1561-1567
4. Pei Z.L., Zhang X.B., Zhang G.P., Gong J., Sun C., Huang R.F., and Wen L.S. Thin Solid Films 497 (2006) 20-23
5. Romero R., Leinen D., Dalchiele E.A., Ramos-Barrado J.R., and Martin F. Thin Solid Films 515 (2006) 1942-1949
6. Xu Z.-q., Deng H., Li Y., and Cheng H. Mater. Sci. Semicon. Proc. 9 (2006) 132-135
7. Lackner J.M. Thin Solid Films 494 (2006) 302-306
8. Shan F.K., and Yu Y.S. Thin Solid Films 435 (2003) 174-178
9. Yaodong L., and Jianshe L. Appl. Surf. Sci. 253 (2007) 3727-3730
10. Oh B.-Y., Jeong M.-C., Lee W., and Myoung J.-M. J. Cryst. Growth 274 (2005) 453-457
11. Lee H.W., Lau S.P., Wang Y.G., Tse K.Y., Hng H.H., and Tay B.K. J. Cryst. Growth 268 (2004) 596-601
12. Zhang Y., Lin B., Fu Z., Liu C., and Han W. Opt. Mater. 28 (2006) 1192-1196
13. Labeau M., Rey P., Deschanvres J.L., Joubert J.C., and Delabouglise G. Thin Solid Films 213 (1992) 94
14. Majumder S.B., Jain M., Dobal P.S., and Katiyar R.S. Mater. Sci. Eng B 103 (2003) 16-25
15. Al Asmar R., Atanas J.P., Ajaka M., Zaatar Y., Ferblantier G., Sauvajol J.L., Jabbour J., Juillaget S., and Foucaran A. J. Cryst. Growth 279 (2005) 394-402
16. Fu E.-G., Zhuang D.-M., Zhang G., Yang W.-F., and Zhao M. Appl. Surf. Sci. 217 (2003) 88-94