Industrially-styled room-temperature pulsed laser deposition of ZnO:Al films

Thin Solid Films

Volumn 494, Issue 1-2, 2006, Pages 302-306

  Lackner, Jürgen M ^a  

^a Laser Center Leoben   (Austria)

Author keywords

AZO; Industrially scaled; Microstructure; PLD; Room temperature deposition; ZnO:Al

Indexed keywords

AMORPHOUS MATERIALS; NEODYMIUM LASERS; PULSED LASER DEPOSITION; SURFACE ROUGHNESS;

DEPOSITION ATMOSPHERE; LASER COATERS; ROOM TEMPERATURE;

ZINC OXIDE;

EID: 27844568975     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.157     Document Type: Conference Paper

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