Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 187-193

  Gilles, J P ^a   Megherbi, S ^a   Raynaud, G ^a   Parrain, F ^a   Mathias, H ^a   Leroux, X ^a   Bosseboeuf, A ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

MEMS; NEMS; Q factor measurement; Resonator; SEM

Indexed keywords

CARBON NANOTUBES; CHARGED PARTICLES; COMPOSITE MICROMECHANICS; DYNAMICAL SYSTEMS; ELECTROCHEMICAL SENSORS; ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; ELECTRON OPTICS; ELECTRON SPECTROSCOPY; ELECTRONS; ELECTROSTATIC ACTUATORS; IMAGING TECHNIQUES; INDUSTRIAL MANAGEMENT; MEASUREMENTS; MEMS; MICROSCOPES; MICROSCOPIC EXAMINATION; PHOTORESISTS; POLYSILICON; Q FACTOR MEASUREMENT; RESONATORS; SCANNING; SCANNING ELECTRON MICROSCOPY; SILICON; VACUUM;

(P ,P ,T) MEASUREMENTS; DYNAMICAL CHARACTERIZATION; ELECTROSTATICALLY DRIVEN; ELSEVIER (CO); IN PLANE VIBRATIONS; MECHANICAL STRUCTURES; MICRO BEAMS; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS; MICROSCOPY TECHNIQUES; NANO-RESONATORS; QUALITY FACTOR (Q FACTOR); SILICON CANTILEVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 44849106151     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.11.026     Document Type: Article

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