Components, building blocks, and demonstrations of spherical mechanisms in microelectromechanical systems

Journal of Mechanical Design

Volumn 130, Issue 3, 2008, Pages

  Lusk, Craig P ^a   Howell, Larry L ^b  

^a University of South Florida   (United States)

^b Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROMECHANICS; PRODUCT DESIGN; UNIVERSAL JOINTS;

MICROMECHANISM;

MEMS;

EID: 44649143903     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2829914     Document Type: Article

References (10)

1. Fukushige, T., Hata, S., and Shimokohbe, A., 2005, "A MEMS Conical Spring Actuator Array," J. Microelectromech. Syst., 44, pp. 243-253.
2. Krulevitch, P., Bierden, P., Bifano, T., Carr, E., Dimas, C., Dyson, H., Helmbrecht, M., Kurczynski, P., Muller, R., Olivier, S., Peter, Y.-A., Sadoulet, B., Solgaard, O., and Yang, E. H., 2003, "MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics," Proc. SPIE, 4983, pp. 227-233.
3. Pister, K. S. J., Judy, M., Burgett, S., and Fearing, S., 1992, "Microfabricated Hinges," Sens. Actuators, 33(3), pp. 249-256.
4. Koester, D. A., Cowen, A., Mahadevan, R., Stonefield, M., and Hardy, B., 2003, "PolyMUMPS Design Handbook, Revision 10.0," MEMSCAP.
5. McCarthy, J. M., 2000, Geometric Design of Linkages, Springer, New York.
6. Martin, D., and Murray, A., 2002, "Developing Classifications for Synthesizing, Refining, and Animating Planar Mechanisms," Proceedings of the 2002 ASME Design Engineering Technical Conference, Montreal, Sept.
7. Chiang, C. H., 1988, Kinematics of Spherical Mechanisms, Cambridge University Press, New York.
8. Lusk, C., and Howell, L., 2004, "A Micro Helico-Kinematic Platform via Spherical Crank-Sliders," Proceedings of the International Mechanical Engineering Conference and Exposition (IMECE), Anaheim, CA, Nov. 13-19.
9. Jensen, B., Howell, L., and Salmon, L., 1999, "Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms," ASME J. Mech. Des., 121, pp. 416-423.
10. Lusk, C. P., and Howell, L. L., 2008, "Spherical Bistable Micromechanism," ASME J. Mech. Des., 130, in press.