A micro helico-kinematic platform via spherical crank sliders

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 131-141

  Lusk, Craig P ^a   Howell, Larry L ^a  

^a Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FORCE MEASUREMENT; KINEMATICS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; MOTION CONTROL; ROTATION; VELOCITY MEASUREMENT;

CONSTANT VELOCITY (CV); CRANK SLIDERS; MICRO HELICO-KINEMATIC PLATFORM (MHKP); MICROMACHINED PROTOTYPE;

MICROMACHINING;

EID: 21644450264     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-59622     Document Type: Conference Paper

References (24)

1. Zhou, T.and Wright, P., Crawford, J., McKinnon, G., and Zhang, Y., 2003. "Mems 3d optical mirror/scanner". MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on July, pp. 222 - 226.
2. Syms, R., Yeatman, E., Bright, V., and Whitesides, G., 2003. "Surface tension-powered self-assembly of microstructures - the state-of-the-art". Journal of Microelectromechanical Systems, 12 Aug., pp. 387-417.
3. Robinson, S., 2000. "Mems technology-micromachines enabling the all optical network". Electronic Components and Technology Conference, 2001. Proceedings, 51 May-June, pp. 423-428.
4. Green, P., Syms, R., and Yeatman, E., 1995. "Demonstration of three-dimensional microstructure self-assembly". Journal of Microelectromechanical Systems, 4 (4) Dec., pp. 170-176.
5. Syms, R. R. A., Gormley, C., and Blackstone, S., 2000. "Surface tension powered self assembly of 3d moems devices using drie of bonded silicon on insulator wafers". In Demonstrated Micromaching Technologies for Industry, IEEE Seminar on, pp. 1-6.
6. Chen, R., Nguyen, H., and Wu, M., 1999. "A high-speed low-voltage stress-induced micromachined 2×2 optical switch". IEEE Photonics Technology Letters, 11, pp. 1396-1398.
7. Yeh, R., Kruglick, E. J. J., and Pister, K. S. J., 1996. "Surface-micromachined components for articulated microrobots". Journal of Microelectromechanical Systems, 5 (1) March, pp. 10-17.
8. Liu, A., Zhang, X., and Lam, Y. "A high performance 4 × 4 free-space fiber-optic crossconnections". In Proc. 2000 IEEE/LEOS International Conference on Optical MEMS, Kanai, HI, Aug. 2000, pp. 37-38.
9. Chiao, J. "Mems technologies for high frequency applications". In Proceedings of ISSS-SPIE 2002, International Conference on Smart Materials Structures and systems, Bangalore, India.
10. Gonzales, C., and Collins, S. D., 1997. "Microjoinery: Micromachined translational stages for optomechanical devices and systems". 1997 IEEE International Conference on Solid-State Sensors and Actuators June.
11. Friedberger, A., and Muller, R., 1998. "Improved surface micromachined hinges for fold-out structures". Journal of Microelectromechanical Systems, 7 (3) September, pp. 315-319.
12. Hui, E., Howe, R., and Rodgers, M., 2000. "Single step assembly of complex 3-d microstructures". Micro Electro Mechanical Systems 2000. The 13th Annual International Conference on, pp. 602-607.
13. Chiang, C. H., 1988. Kinematics of Spherical Mechanisms. Cambridge University Press, New York, NY.
14. Norton, R., 2004. Design of Machinery 3rd Ed.: An Introduction to the Synthesis and Analysis of Mechanisms and Machines. McGraw-Hill, New York, NY.
15. Comtois, J., Bright, V., and Phipps, M., 1995. "Thermal microactuators for surface-micromachining processes". Proceedings of SPIE - The International Society for Optical Engineering, 2642, pp. 10-21.
16. Tai, Y. C., Fan, L., and Mueller, R., 1989. "Ic- processed electrostatic micro-motors". Proceedings of IEEE Micro Electro-Mechanical Systems Workshop (Salt Lake City, UT) Feb, pp. 1-6.
17. Garcia, E. J., and Sniegowski, J. J., 1995. "Surface micromachined microengine". Sensors and Actuators A, 48, p. 203.
18. Chou, B., Lin, W., and Chiou, J., 2001. "Study of micromachined tunable filter and its potential application to tunable laser". Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on, 1 July, pp. 418-419.
19. Lammel, G., Schweizer, S., and Renaud, P., 2001. "Mems infrared gas spectrometer based on a porous silicon tunable filter". Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on Jan., pp. 578-581.
20. Arch, D., Uhnstein, T., Zook, D., and Guckel, H., 1996. "A mems-based tunable infrared filter for spectroscopy". Advanced Applications of Lasers in Materials Processing, 1996/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications, 1996. IEEE/LEOS 1996 Summer Topical Meetings Aug., pp. 21-22.
21. Neukermans, A., 2001. "Mems technology for optical interconnect and networking applications". Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE, 2 Nov, pp. 732-733.
22. Spiegel, M. R., and Liu, J., 1999. Schaum's Outlines: Mathematical Handbook of Formulas and Tables. McGraw-Hill, New York, NY.
23. Henderson, D. W., 2001. Experiencing Geometry: In Euclidean, Spherical, and Hyperbolic Spaces, 2nd Edition. Prentice Hall, Upper Saddle River, NJ.
24. Markus, K., and Walters, M., 1995. "Mems commercialization activities at mcnc". WESCON/'95. Conference record. 'Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies' Nov., p. 314.