Switchable cantilever for a time-of-flight scanning force microscope

Applied Physics Letters

Volumn 84, Issue 9, 2004, Pages 1558-1560

  Lee, DongWeon ^a,b   Wetzel, Adrian ^b   Bennewitz, Roland ^b   Meyer, Ernst ^b   Despont, Michel ^a   Vettiger, Peter ^a   Gerber, Christoph ^a,b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANNEALING; CANTILEVER BEAMS; DESORPTION; ELECTRIC INSULATION; ELECTRIC POTENTIAL; ELECTRODES; IONIZATION; MELTING; OXIDATION; SCANNING ELECTRON MICROSCOPY; SWITCHING SYSTEMS;

SWITCHABLE CANTILEVER (SC) DEVICES; TIME-OF-FLIGHT SCANNING FORCE MICROSCOPE (TOF-SFM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 1642604030     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1651641     Document Type: Article

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