High yield automated MEMS assembly

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 1099-1104

  Popa, Dan O ^a   Lee, Woo Ho ^a   Murthy, Rakesh ^a   Das, Aditya N ^a   Stephanou, Harry E ^a  

^a Department of Electrical Engineering ^*

Author keywords

[No Author keywords available]

Indexed keywords

MEMS ASSEMBLY; MICROPART DESIGN; MICROROBOTICS;

ELECTRONIC EQUIPMENT MANUFACTURE; MONOLITHIC INTEGRATED CIRCUITS; PRODUCTION ENGINEERING; RANDOM PROCESSES; ROBOTIC ASSEMBLY;

MEMS;

EID: 44449155459     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341718     Document Type: Conference Paper

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