X-ray fluorescence as an additional analytical method for a scanning electron microscope

Microchimica Acta

Volumn 161, Issue 3-4, 2008, Pages 413-419

  Procop, Mathias ^a   Hodoroaba, Vasile Dan ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Analytical SEM; Scanning electron microscopy; X ray fluorescence analysis; X ray optics; X ray production yield; X ray spectroscopy; X ray tube spectrum; XRF

Indexed keywords

EID: 44349182009     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-007-0854-4     Document Type: Conference Paper

References (27)

1. B J Cross K C Witherspoon 2004 Integrated electron and X-ray induced microbeam XRF in a SEM Microsc Today 12 20
2. A Bjeoumikhov V Arkadiev F Eggert V-D Hodoroaba N Langhoff M Procop J Rabe R Wedell 2005 A new microfocus X-ray source, iMOXS, for highly sensitive XRF analysis in scanning electron microscopes X-Ray Spectrom 34 493
3. Haschke M (2007) Microanalysis using a μ-XRF system, Book of Abstracts, EMAS 2007, p 163
4. 1,2,3 spectra of X-ray tubes X-Ray Spectrom 32 46
5. D C Joy 1998 The efficiency of X-ray production J Microscopy 191 1 74
6. M Procop 2004 Measurement of X-ray emission efficiency for K-lines Microsc Microanal 10 481
7. J Sherman 1955 The theoretical derivation of fluorescent X-ray intensities from mixtures Spectrochim Acta 7 283
8. M Mantler N Kawahara 2004 How accurate are modern fundamental parameter methods? Rigaku J 21 17
9. W T Elam B D Ravel J R Sieber 2002 A new atomic database for X-ray spectroscopic calculations Radiation Phys Chem 63 121
10. I Pozsgai 1991 X-ray microfluorescence analysis inside and outside the electron microscope X-Ray Spectrom 20 215
11. System SEMRAY, www.emsystems.biz/en/products/semray.html
12. T Sun X Ding 2006 X-ray source for X-ray microfluorescence using a monolithic X-ray focusing lens combined with aperture optics X-Ray Spectrom 35 120
13. A Bjeoumikhov N Langhoff R Wedell V Beloglazov N Lebed'ev N Skibina 2003 New generation of polycapillary lenses: manufacture and applications X-Ray Spectrom 32 172
14. F Scholze M Procop 2001 Measurement of detection efficiency and response functions for an Si(Li) X-ray spectrometer in the range 0.1-5∈keV X-Ray Spectrom 30 69
15. M Procop F Scholze 2004 Synchrotron radiation for the characterization of energy dispersive X-ray spectrometers Microsc Microanal 10 Suppl 2 98
16. J-L Pouchou F Pichoir 1991 Quantitative Analysis of homogeneous or stratified microvolumes applying the model "PAP" K F J Heinrich D E Newbury Electron probe quantitation Plenum Press New York 31
17. J K F Heinrich 1995 Electron beam X-ray microanalysis Van Nostrand New York 297
18. M Green V E Cosslett 1968 Measurement of K, L and M shell X-ray production efficiencies Brit J Appl Phys (J Phys D) Ser 2 1 425
19. S J B Reed 1975 The shape of continuous X-ray spectrum and background corrections for energy-dispersive electron microprobe analysis X-Ray Spectrom 4 14
20. G Castellano J Osan J Trincavelli 2004 Analytical model for the bremsstrahlung spectrum in the 0.25-20∈keV photon energy range Spectrochim Acta B 59 313
21. M Alvisi M Blome M Griepentrog V-D Hodoroaba P Karduck M Mostert M Nacucchi M Procop M Rohde F Scholze P Statham R Terborg J-F Thiot 2006 The determination of the efficiency of energy dispersive X-Ray spectrometers by a new reference material Microsc Microanal 12 406
22. A H Compton S K Allison 1935 X-rays in theory and experiment Van Nostrand New York 710
23. X-ray tube MCBM50, RTW Röntgentechnik Warrikhoff, www.rtwxray.de
24. WinAxil X-Ray Analysis Software, www.canberra.com/products/438012.asp
25. N A Dyson 1959 The continuous X-ray spectrum from electron-opaque targets Proc Phys Soc 73 924
26. th ICXOM Boston 1977 Pendell Publishers Midland 141
27. M Procop V-D Hodoroaba A Bjeoumikhov 2006 Calculation of X-ray spectra for a side window tube Microsc Microanal 12 Suppl 2 858CD