Comparison of RSG-MOSFET and capacitive MEMS resonator detection

Electronics Letters

Volumn 41, Issue 5, 2005, Pages 242-244

  Abele N ^a   Pott, V ^a   Boucart, K ^a   Casset, F ^c   Segueni K ^b   Ancey, P ^b   Ionescu, A M ^a  

^a EPFL   (Switzerland)

^b STMICROELECTRONICS   (France)

^c CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DAMPING; ELECTROSTATICS; FREQUENCIES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; RESONATORS; RIGIDITY;

ACTUATION; ANALYTICAL MODELING; METAL PLATES; RESONANCE FREQUENCY;

MOSFET DEVICES;

EID: 15544384589     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20047409     Document Type: Article

References (5)

1. Lee, S., Demerci, M.U., and Nguyen, C.T.-C.: 'A 10 MHz micro-mechanical resonator Pierce reference oscillator for communications'. Transducers'01, pp. 1094-1097
2. Nathanson, H.C., et al.: 'The resonant gate transistor', IEEE Trans. Electron Devices, 1967, ED-14, (3), pp. 117-133
3. Timoshenko, S., Young, D.H., and Weaver, W.: 'Vibration problems in engineering' (John Wiley and Sons, New York, 1974)
4. Ionescu, A.M., et al.: 'Modeling and design of a low-voltage SOI suspended-gate MOSFET with a metal-over-gate architecture'. ISQED'02
5. Mahfoz-Kotb, H., et al.: 'Air gap polycristalline silicon thin film transistors for fully integrated sensors', IEEE Electron Device Lett., 2003, 24, (3), pp. 165-167.