Development of oxygen transport model in Czochralski growth of silicon crystals

Journal of Crystal Growth

Volumn 310, Issue 12, 2008, Pages 2970-2976

  Smirnov, A D ^a   Kalaev, V V ^b  

^a STR Group Ltd   (Russian Federation)

^b STR GmbH   (Germany)

Author keywords

A1. Computer simulation; A1. Mass transfer; A2. Czochralski method; B1. Silicon

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; OXYGEN; SILICON;

OXYGEN CONCENTRATION; OXYGEN TRANSPORT; TURBULENT MELT FLOW;

MASS TRANSFER;

EID: 44149127440     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.03.002     Document Type: Article

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