Real-time gripping detection for a mechanically actuated microgripper

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1022-1026

  Blideran, M M ^a   Fleischer, M ^a   Grauvogel, F ^b   Loffler K ^b   Langer, M G ^b   Kern, D P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

^b UNIVERSITY OF ULM   (Germany)

Author keywords

Laser beam deflection; Lateral force microscopy; Microgripper; Micromanipulation

Indexed keywords

COMPUTER SIMULATION; LASER BEAMS; MEASUREMENT THEORY; MICROMANIPULATORS; MICROSCOPIC EXAMINATION;

LASER BEAM DEFLECTION; LATERAL FORCE MICROSCOPY; MICROGRIPPERS;

GRIPPERS;

EID: 44149119113     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.029     Document Type: Article

References (16)

1. A. Albut, Q. Zhou, C.d. Corral, H.N. Koivo, in: Proc. Second VDE World Microtechnologies Congress, MICRO.tec 2003, 2003, p. 507.
2. Kim D.-H., Lee M.G., Kim B., and Sun Y. Smart Mater. Struct. 14 (2005) 1265
3. Fahlbusch S., and Fatikow S. Ultramicroscopy 86 (2001) 181
4. Ferreira A., Cassier C., Haddab Y., Rougeot P., and Chaillet N. Proc. SPIE 4568 (2001) 112
5. D.H.B. Wicaksono, A. Andreykiv, K. Kwok, H.-C. Wu, M. Tichem, DIMES & DCMM Summer School 2005 Report, .
6. Blideran M.M., Bertsche G., Henschel W., and Kern D.P. Microelectron. Eng. 83 (2006) 1382
7. Blideran M.M., Fleischer M., Henschel W., Kern D.P., Sterr J., Schock K., Kleindiek S., Langer M.G., Löffler K., and Grauvogel F. J. Vac. Sci. Technol. B 24 (2006) 3239
8. Meyer G., and Amer N.M. Appl. Phys. Lett. 53 (1988) 2400
9. Amer N.M., and Olmstead M.A. Surf. Sci. 132 (1983) 68
10. Amer N.M., Skumanich A., and Ripple D. Appl. Phys. Lett. 49 (1986) 137
11. Zhou Y., and Nelson B.J. Proc. SPIE 3834 (1999) 211
12. Kleindiek Micromanipulator, .
13. von Mises R. Angew. Math. Mech. 8 (1928) 161
14. Mate C.M., McClelland G.M., Erlandsson R., and Chiang S. Phys. Rev. Lett. 59 (1987) 1942
15. Meyer G., and Amer N.M. Appl. Phys. Lett. 57 (1990) 2089
16. Giessibl F.J., Herz M., and Mannhart J. PNAS 99 (2002) 12006