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Ultramicroscopy
Volumn 86, Issue 1-2, 2001, Pages 181-190
Implementation of self-sensing SPM cantilevers for nano-force measurement in microrobotics
Author keywords

Cantilever sensors; Micromanipulation; Microrobots; Scanning probe microscopy
Indexed keywords

ADHESION; CANTILEVER; CONFERENCE PAPER; DEVICE; DYNAMICS; MICROMANIPULATION; ROBOTICS; SCANNING PROBE MICROSCOPY; SENSOR; TECHNIQUE;
EID: 0035136026     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(00)00085-1     Document Type: Article
Times cited : (19)
References (11)
  • 2
    • 84992237117 scopus 로고    scopus 로고
    • J.-M. Breguet, E. Pernette, R. Clavel, Stick and slip actuators and parallel architectures dedicated to microrobotics, Microrobotics: Components and Applications, Proceedings of the SPIE 2906, Boston, MA, 1996
  • 3
    • 84992290793 scopus 로고    scopus 로고
    • A. Sulzmann, J. Jacot, 3D computer vision for microassembly stations and microfabrication, Microrobotics and Microsystem Fabrication, Proceedings of the SPIE 3202, Pittsburgh, 1997
  • 4
    • 84992267542 scopus 로고    scopus 로고
    • S. Fatikow, An Automated micromanipulation desktop station based on mobile piezoelectric microrobots, Microrobotics: Components and Applications, Proceedings of the SPIE 2906, Boston, MA, 1996
  • 5
    • 84992259308 scopus 로고    scopus 로고
    • A Practical Guide to Scanning Probe Microscopy, Sunnyvale, CA, USA: Park Scientific Instruments
    • (1997)
    • Howland, R.1    Benatar, L.2
  • 6
    • 84992236304 scopus 로고    scopus 로고
    • R. Munassypov, B. Grossmann, B. Magnussen, S. Fatikow, Development and control of piezoelectric actuators for the mobile micromanipulation system, Proceedings of the ACTUATOR, Bremen, 1996
  • 7
    • 84992236305 scopus 로고    scopus 로고
    • J. Seyfried, S. Fatikow, Microrobot-based microassembly station and its control using a graphical user interface, Proceedings of the SYROCO, Nantes, 1997
  • 8
    • 84992240383 scopus 로고    scopus 로고
    • L. Benmayor, S. Koelemeijer, J. Jacot, Force measurement in microassembly, Proceedings. SPIE 3834, Boston, MA, 1999
  • 9
    • 84992255045 scopus 로고    scopus 로고
    • St. Fahlbusch, S. Fatikow, Force sensing in microrobotic systems - an overview, Proceedings of the 5th IEEE International Conference of Electronics, Circuits and Systems (ICECS '98), Lisboa, Portugal, 1998, pp. 259-262
  • 10
    • 84992236582 scopus 로고    scopus 로고
    • R.S. Fearing, Survey of sticking effects for micro parts handling, Proceedings of the International Conference on Intelligent Robots and Systems, 2, Pittsburgh, 1995
  • 11
    • 84992284727 scopus 로고    scopus 로고
    • B. Nelson, Y. Zhou, B. Vikramaditya, Integration of force and vision feedback for microassembly, Proceedings of the SPIE 3202, Boston, MA, 1997

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.