Characterization of a silicon-on-insulator based thin film resistor in electrolyte solutions for sensor applications

Journal of Applied Physics

Volumn 95, Issue 7, 2004, Pages 3811-3815

  Nikolaides, M G ^a   Rauschenbach, S ^a   Bausch, A R ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULAR RECOGNITION; THIN FILM RESISTORS;

CHEMICAL SENSORS; ELECTRIC CONDUCTIVITY; ELECTRIC CONTACTS; ELECTROCHEMICAL ELECTRODES; ELECTROLYTES; GATES (TRANSISTOR); INTERFACES (MATERIALS); LEAKAGE CURRENTS; PASSIVATION; PH EFFECTS; POLYMETHYL METHACRYLATES; SENSITIVITY ANALYSIS; SIGNAL TO NOISE RATIO; SOLUTIONS; SPIN COATING; THIN FILM DEVICES;

SILICON ON INSULATOR TECHNOLOGY;

EID: 1942510495     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1650880     Document Type: Article

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