FDTD-based optical simulations methodology for CMOS image sensor pixels architecture and process optimization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6816, Issue , 2008, Pages

  Hirigoyen, Flavien ^a   Crocherie, Axel ^a,b   Vaillant, Jérôme ^a   Cazaux, Yvon ^a  

^a STMICROELECTRONICS   (France)

^b IMEP LAHC   (France)

Author keywords

CMOS image sensor; Finite difference time domain; Microlens; Optical simulation; Ray tracing

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DIFFRACTION; FINITE DIFFERENCE TIME DOMAIN METHOD; OPTIMIZATION; PIXELS; RAY TRACING;

INDUSTRIALIZATION; MICROLENS; OPTICAL SIMULATION;

IMAGE SENSORS;

EID: 43649093840     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.766391     Document Type: Conference Paper

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