Deposition and field-emission characterization of electrically conductive nitrogen-doped diamond-like amorphous carbon films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1857-1861

  Kinoshita, Haruhisa ^a   Ikuta, Ryo ^a   Murakami, Satoshi ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND-LIKE AMORPHOUS CARBON (DAC); ELECTRODE SPACING; FIELD EMITTERS; PLASMA COOLING;

AMORPHOUS FILMS; ANNEALING; COOLING; CURRENT DENSITY; ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; ELECTROCHEMICAL ELECTRODES; ELECTRODEPOSITION; ELECTRON EMISSION; IONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR DOPING; SUBSTRATES;

DIAMOND LIKE CARBON FILMS;

EID: 4344695690     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1756878     Document Type: Conference Paper

References (17)

1. Y. K. Hong, J. J. Kim, C. Park, J. S. Kim, and J. K. Kim, J. Vac. Sci. Technol. B 16, 729 (1998).
2. G. A. J. Amaratunga and S. R. P. Silva, Appl. Phys. Lett. 68, 2529 (1996).
3. W. Knapp and D. Schleussner, Vacuum 69, 333 (2003).
4. O. M. Küttel, O. Groening, C. Emmenegger, and L. Schlapbach, Appl. Phys. Lett. 73, 2113 (1998).
5. V. Semet et al., Appl. Phys. Lett. 81, 343 (2002).
6. A. A. Evtukh, V. G. Litovchenko, N. I. Klyui, R. I. Marchenko, and. S. Y. Kudzinovski, J. Vac. Sci. Teehnol. B 17, 679 (1999).
7. E. J. Chi, J. Y. Shim, H. K. Baik, and S. M. Lee, Appl. Phys. Lett. 71, 324 (1997).
8. K. Sawada, H. Kinoshita, T. Masuda, and M. Ishida, J. Vac. Sci. Technol. B 18, 1044 (2000).
9. C. A. Spindt, I. Brodie, L. Humphery, and E. R. Westerberg, J. Appl. Phys. 47, 5248 (1976).
10. C. Weissmantel, G. Reisse, H.-J. Erler, F. Henny, K. Bewilogua, U. Ebersbach, and C. Schürer, Thin Solid Films 63, 315 (1979).
11. H. Kinoshita and N. Otaka, J. Vac. Sci. Technol. A 20, 1481 (2002).
12. H. Kinoshita, F. Fukushima, M. Kando, Y. Nakagawa, and T. Tsukada, J. Appl. Phys. 88, 2263 (2000).
13. A. Ilie, A. C. Ferrari, T. Yagi, S. E. Rodil, J. Robertson, E. Barborini, and P. Milani, J. Appl. Phys. 90, 2024 (2001).
14. Y. K. Yap, S. Kida, T. Aoyama, Y. Mori, and T. Sasaki, Appl. Phys. Lett. 73, 915 (1998).
15. H. Kinoshita and A. Yamauchi, J. Vac. Sci. Technol. A 14, 1933 (1996).
16. H. Kinoshita, A. Yamauchi, and M. Sawai, J. Vac. Sci. Technol. B 17, 109 (1999).
17. J. B. Cui, J. Robertson, and W. I. Milne, J. Appl. Phys. 89, 3490 (2001).