An optical switch with newly designed electrostatic actuators for optical cross connects

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 121-122

  Yoon, Yongseop ^a   Bae, Kideok ^a   Kim, Jinhwan ^a   Choi, Hyung ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATICS; MOEMS; OPTICAL SWITCHES; TELECOMMUNICATION NETWORKS;

ACTUATING MECHANISMS; DRIVING CIRCUITS; FABRICATION PROCESS; GOOD COMPATIBILITY; LOW-COST DEVICES; OPTICAL CROSS CONNECTS; OPTICAL PERFORMANCE; SIMPLE STRUCTURES;

ELECTROSTATIC ACTUATORS;

EID: 84944795749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031473     Document Type: Conference Paper

References (4)

1. Hiroshi Toshiyoshi and Hiroyuki Fujita, J. of MEMS., vol. 5, No. 4, Dec. 1996, pp. 231-237
2. Yongseop Yoon, Kideok Bae and Hyung Choi, 2001 IEEE/LEOS Int. Conf. on Optical MEMS, Sep. 2001, pp. 97-98
3. Jack W. Judy and Richard S. Muller, J. of MEMS., Vol. 6, No. 3, Sep. 1997, pp. 249-256
4. J. Buhler, et al., J. of MEMS., Vol. 6, No. 2, Jul. 1997, pp. 126-135