Preparation of carbon nitride film by cryogenic laser processing

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 1477-1479

  Sato, T ^a   Narazaki, A ^a   Kawaguchi, Y ^a   Niino, H ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; CHEMICAL VAPOR DEPOSITION; CRYOGENICS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER BEAM EFFECTS; MOLECULAR STRUCTURE; NITROGEN; POLYMERIZATION; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; CYANURIC TRIAZIDE; SOLID NITROGEN; X-RAY RADIATION;

CARBON INORGANIC COMPOUNDS;

EID: 4344618061     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2821-9     Document Type: Conference Paper

References (15)

1. A.Y. Liu, M.L. Cohen: Science 245, 841 (1989)
2. A.Y. Liu, M.L. Cohen: Phys. Rev. B 41, 10727 (1990)
3. S. Muhl, J.M. Mendez: Diamond Relat. Mater. 8, 1809 (1999)
4. T. Malkow: Mater. Sci. Eng. A 302, 311 (2001)
5. C. Niu, Y.Z. Lu, C.M. Lieber: Science 261, 334 (1993)
6. E.G. Gillan: Chem. Mater. 12, 3906 (2000)
7. J. Wang, E.G. Gillan: Thin Solid Films 422, 62 (2002)
8. T. Sato, A. Narazaki, Y. Kawaguchi, H. Niino, G. Bucher: Angew. Chem. Int. Ed. Engl. 42, 5206 (2003)
9. L. Maya: J. Polym. Sci. A, Polym. Chem. 31, 2595 (1993)
10. K. Ogata, J. Fernando, D. Chubaci, F. Fujimoto: J. Appl. Phys. 76, 3791 (1994)
11. Y. Taki, T. Kitagawa, O. Takai: Thin Solid Films 304, 183 (1997)
12. K. Yamamoto, Y. Koga, S. Fujiwara, F. Kokai, J.I. Kleiman, K.K. Kim: Thin Solid Films 339, 38 (1999)
13. D. Marton, K.J. Boyd, A.H. Al-Bayati, S.S. Todorov, J.W. Rabalais: Phys. Rev. Lett. 73, 118 (1994)
14. F. Falk, J. Meinshien, K. Schuster, H. Stafast: Carbon 36, 765 (1998)
15. L. Galán, I. Montero, F. Rueda: Surf. Coat. Technol. 83, 103 (1996)