Effect of ion mass and charge state on transport of vacuum arc plasmas through a biased magnetic filter

IEEE Transactions on Plasma Science

Volumn 32, Issue 2 I, 2004, Pages 433-438

  Byon, Eungsun ^a   Kim, Jong Kuk ^a   Kwon, Sik Chol ^a   Anders, André ^b,c  

^a Korea Institute of Machine and Materials   (South Korea)

^b IEEE   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODIC VACUUM ARC; ION CHARGE STATES; ION MASS; MACROPARTICLE FILTER; PARTICLE SYSTEM COEFFICIENT; PLASMA TRANSPORT; VACUUM ARC PLASMAS;

COMPOSITION EFFECTS; COPPER; ELECTRIC CURRENT MEASUREMENT; ELECTRIC FIELD EFFECTS; GRAPHITE; IONS; MAGNETIC FIELD EFFECTS; MAGNETIC FILTERS; MATERIALS TESTING; PLASMA SOURCES; TRANSPORT PROPERTIES; TUNGSTEN;

PLASMAS;

EID: 4344602797     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2004.826363     Document Type: Article

References (28)

1. I. G. Brown, "Cathodic arc deposition of films," Annu. Rev. Mat. Sci., vol. 28, pp. 243-269, 1998.
2. R. L. Boxman, D. M. Sanders, and P. J. Martin, Handbook of Vacuum Arc Science and Technology. Park Ridge, NJ: Noyes, 1995.
3. A. A. Plyutto, V. N. Ryzhkov, and A. T. Kapin, "High speed plasma streams in vacuum arcs," Sov. Phys. JETP, vol. 20, pp. 328-337, 1965.
4. W. D. Davis and H. C. Miller, "Analysis of the electrode products emitted by dc arcs in a vacuum ambient," J. Appl. Phys., vol. 40, pp. 2212-2221, 1969.
5. A. Anders and G. Y. Yushkov, "Ion flux from vacuum arc cathode spots in the absence and presence of magnetic fields," J. Appl. Phys., vol. 91, pp. 4824-4832, 2002.
6. E. Byon and A. Anders, "Ion energy distribution functions of vacuum arc plasmas," J. Appl. Phys., vol. 93, pp. 1899-1906, 2003.
7. O. R. Monteiro, "Novel metallization technique for filling 100-nm-wide trenches and vias with very high aspect ratio," J. Vac. Sci. Technol. B, vol. 17, pp. 1094-1097, 1999.
8. P. Siemroth, C. Wenzel, W. Kliomes, B. Schultrich, and T Schülke, "Metallization of sub-micron trenches and vias with high aspect ratio," Thin Solid Films, vol. 308, pp. 455-459, 1997.
9. I. I. Aksenov, V. A. Belous, V. G. Padalka, and V. M. Khoroshikh, "Transport of plasma streams in a curvilinear plasma-optics system," Sov. J. Plasma Phys., vol. 4, pp. 425-428, 1978.
10. A. Anders, S. Anders, and I. G. Brown, "Transport of vacuum arc plasmas through magnetic macroparticle filters," Plasma Sources Sci. Technol., vol. 4, pp. 1-12, 1995.
11. A. Anders, "Approaches to rid cathodic arc plasma of macro- and nanoparticles: a review," Surf. Coat. Technol., vol. 120-121, pp. 319-330, 1999.
12. X. Shi, B. G. Tay, and S. P. Lau, "The double bend filtered cathodic arc technology and its applications," Int. J. Mod. Phys. B, vol. 14, pp. 136-153, 2000.
13. I. I. Aksenov, V. A. Belous, V. G. Padalka, and V. M. Khoroshikh, "Apparatus to rid the plasma of a vacuum arc of macroparticles," Instrum. Exp. Tech., vol. 21, pp. 1416-1418, 1978.
14. J. Koskinen, A. Anttila, and J.-P. Hirvonen, "Diamond-like carbon coatings by arc-discharge methods," Surf. Coat. Technol., vol. 47, pp. 180-187, 1991.
15. A. Anders and R. A. MacGill, "Twist filter for the removal of macroparticles from cathodic arc plasmas," Surf. Coat. Technol., vol. 133-134, pp. 96-100, 2000.
16. E. Byon and A. Anders, "Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas," J. Appl. Phys., vol. 93, pp. 8890-8897, 2003.
17. M. M. M. Bilek, Y. Yin, and D. R. McKenzie, "A study of filter transport mechanisms in filtered cathodic vacuum arcs," IEEE Trans. Plasma Sci., vol. 24, pp. 1165-1173, 1996.
18. I. G. Brown, "Vacuum arc ion sources," Rev. Sci. Instrum., vol. 65, pp. 3061-3081, 1994.
19. A. Anders, "Ion charge state distributions of vacuum arc plasmas: the origin of species," Phys. Rev. E, vol. 55, pp. 969-981, 1997.
20. A. Anders, B. Yotsombat, and R. Binder, "Correlation between cathode properties, burning voltage, and plasma parameters of vacuum arcs," J. Appl. Phys., vol. 89, pp. 7764-7771, 2001.
21. E. M. Oks, A. Anders, I. G. Brown, M. R. Dickinson, and R. A. MacGill, "Ion charge state distributions in high current vacuum arc plasma in a magnetic field," IEEE Trans. Plasma Sci., vol. 24, pp. 1174-1183, 1996.
22. R. A. MacGill, M. R. Dickinson, A. Anders, O. R. Monteiro, and I. G. Brown, "Streaming metal plasma generation by vacuum arc plasma guns," Rev. Sci. Instrum., vol. 69, pp. 801-803, 1998.
23. A. Anders, R. A. MacGill, and T. A. McVeigh, "Efficient, compact power supply for repetitively pulsed, "triggerless" cathodic arcs," Rev. Sci. Instrum., vol. 70, pp. 4532-4534, 1999.
24. M. Kaminsky, Atomic and Ionic Impact Phenomena on Metal Surfaces. Berlin, Germany: Springer-Verlag, 1965.
25. A. Anders, S. Anders, and I. G. Brown, "Effect of duct bias on transport of vacuum arc plasmas through curved magnetic filters," J. Appl. Phys., vol. 75, pp. 4900-4905, 1994.
26. M. M. M. Bilek, D. R. McKenzie, Y. Yin, M. U. Chhowalla, and W. I. Milne, "Interactions of the directed plasma from a cathodic arc with electrodes and magnetic field," IEEE Trans. Plasma Sci., vol. 24, pp. 1291-1298, 1996.
27. J. Storer, J. E. Galvin, and I. G. Brown, "Transport of vacuum arc plasma through straight and curved magnetic ducts," J. Appl. Phys., vol. 66, pp. 5245-5250, 1989.
28. M. M. M. Bilek and I. G. Brown, "The effects of transmission through a magnetic filter on the ion charge state distribution of a cathodic vacuum arc plasma," IEEE Trans. Plasma Sci., vol. 27, pp.