A flow direction sensor fabricated using MEMS technology and its simple interface circuit

Sensors and Actuators, B: Chemical

Volumn 91, Issue 1-3, 2003, Pages 347-352

  Park, Sekwang ^a   Kim, Seunghyun ^a   Kim, Sunghyun ^a   Kim, Yongduk ^a  

^a Kyungpook National University   (South Korea)

Author keywords

ASIC; Circular type; Flow direction; MEMS

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; FLOW MEASUREMENT; MICROELECTROMECHANICAL DEVICES; PLATINUM; SILICON WAFERS; SPUTTERING;

FLOW DIRECTION; THERMAL FLOW;

MICROSENSORS;

EID: 12444290148     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00109-6     Document Type: Article

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