Bidirectional reflection measurements of periodically microstructured silicon surfaces

International Journal of Thermophysics

Volumn 25, Issue 4, 2004, Pages 1235-1252

  Chen, Y B ^a   Zhu, Q Z ^a   Wright, T L ^a   King, W P ^a   Zhang, Z M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bidirectional reflection; Diffraction; Grating; Scattering; Silicon microstructures

Indexed keywords

BIDIRECTIONAL REFLECTION; PHOTOMASKS; SILICON MICROSTRUCTURES; THERMOPHOTOVOLTAIC DEVICES;

ANISOTROPY; DIFFRACTION; ENERGY CONVERSION; ETCHING; MICROELECTRONICS; MICROSTRUCTURE; REFLECTION; SILICON WAFERS; SURFACE TOPOGRAPHY; SURFACE TREATMENT;

SURFACE CHEMISTRY;

EID: 4344578961     PISSN: 0195928X     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:IJOT.0000038512.28195.5c     Document Type: Article

References (26)

1. A. K. Sharma, S. H. Zaidi, P. C. Logofatu, and S. R. J. Brueck, IEEE J. Quantum Electron. 38:1651 (2002).
2. G. Sarusi, B. F. Levine, S. J. Pearton, K. M. S. Bandara, and R. E. Leibenguth, Appl. Phys. Lett. 64:960 (1994).
3. A. Boueke, R. Kuhn, P. Fath, G. Willeke, and E. Bucher, Solar Energy Mater. Solar Cells 65:549 (2001).
4. T. J. Coutts, Renewable and Sustainable Energy Rev. 3:77 (1999).
5. A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47:2399 (2000).
6. Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78:142 (2001).
7. J. P. Hebb, K. F. Jensen, and J. Thomas, IEEE Trans. Semocond. Manuf. 11:607 (1998).
8. Z. M. Zhang, Annu. Rev. Heat Transfer 11:351 (2000).
9. S. S. H. Naqvi, R. H. Krukar, J. R. McNeil, J. E. Franke, T. M. Niemczyk, D. M. Haaland, R. A. Gottscho, and A. Kornblit, J. Opt. Soc. Am. A 11:2485 (1994).
10. J. Homola, I. Koudela, and S. S. Yee, Sens. Actuators B 54:16 (1999).
11. D. K. Kambhampati, T. A. M. Jakob, J. W. Robertson, M. Cai, J. E. Pemberton, and W. Knoll, Langmuir 17:1169 (2001).
12. R. B. Zipin, Appl. Opt. 5:1954 (1966).
13. Z. M. Zhang, C. J. Fu, and Q. Z. Zhu, Adv. Heat Transfer 37:179 (2003).
14. P. J. Hesketh, J. N. Zemel, and B. Gebhart, Nature 324:549 (1986).
15. P. J. Hesketh, B. Gebhart, and J. N. Zemel, J. Heat Transfer 110:680 (1988).
16. T. K. Wang and J. N. Zemel, Appl. Opt. 32:2021 (1993).
17. J.-J. Greffet, R. Carminati, K. Joulain, J. P. Mulet, S. Mainguy, and Y. Chen, Nature 416:61 (2002).
18. R. Carminati and J.-J. Greffet, Phys. Rev. Lett. 82:1660 (1999).
19. H. Sai, H. Yugami, Y. Akiyama, Y. Kanamori, and K. Hane, J. Opt. Soc. Am. A 18:1471 (2001).
20. S. Maruyama, T. Kashiwa, H. Yugami, and M. Esashi, Appl. Phys. Lett. 79:1393 (2001).
21. D. W. Cohn, K. Tang, and R. O. Buckius, Int. J. Heat Mass Transfer 40:3223 (1997).
22. K. Tang and R. O. Buckius, Microscale Thermophys. Eng. 2:245 (1998).
23. Y. J. Shen, Q. Z. Zhu, and Z. M. Zhang, Rev. Sci. Instrum. 74:4885 (2003).
24. M. J. Madou, in Fundamentals of Microfabrication (CRC Press, Boca Raton, Florida, 2002), Chap. 2.
25. P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Artech House, Norwood, Massachusetts, 1987), Chap. 4.
26. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968).