Study of leakage mechanisms of the copper/Black Diamond™ damascene process

Thin Solid Films

Volumn 462-463, Issue SPEC. ISS., 2004, Pages 330-333

  Yiang, K Y ^a   Guo, Q ^b   Yoo, W J ^a   Krishnamoorthy, Ahila ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Conduction mechanisms; Interconnects; Low k

Indexed keywords

CONDUCTION MECHANISMS; DAMASCENE STRUCTURES; ELECTROCHEMICAL PLATING;

CARBON; DIELECTRIC MATERIALS; DOPING (ADDITIVES); ELECTROCHEMISTRY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THICKNESS MEASUREMENT; THIN FILMS;

COPPER;

EID: 4344560406     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.05.051     Document Type: Article

References (11)

1. Kim S., Cho T., Ho P. Proceedings of the 38th Annual International Reliability Physics Symposium, San Jose, CA. 2000;277 IEEE, Piscataway, NJ.
2. Noguchi J., Ohashi N., Ashihara H., Yasuda J., Yamaguchi H., Owada N., Takeda K., Hinode K. Proceedings of the 38th Annual International Reliability Physics Symposium, San Jose, CA. 2000;339 IEEE, Piscataway, NJ.
3. Bersuker G., Blaschke V., Choi S., Wick D. Proceedings of the 38th Annual International Reliability Physics Symposium, San Jose, CA. 2000;344 IEEE, Piscataway, NJ.
4. Noguchi J., Saito T., Ohashi N., Ashihara H., Maruyama H., Kubo M., Yamaguchi H., Ryuzaki D., Takeda K., Hinode K. Proceedings of the 39th Annual International Reliability Physics Symposium, Orlando, FL. 2001;355 IEEE, Piscataway, NJ.
5. Song W.S., Kim T.J., Lee D.H., Kim T.K., Lee C.S., Kim J.W., Kim S.Y., Jeong D.K., Park K.C., Wee Y.J., Suh B.S., Choi S.M., Kang H.-K., Suh K.P., Kim S.U. Proceedings of the 38th Annual International Reliability Physics Symposium, Dallas, TX. 2002;355 IEEE, Piscataway, NJ.
6. Tsu R., McPherson J.W., McKee W.R. Proceedings of the 38th Annual International Reliability Physics Symposium, San Jose, CA. 2000;348 IEEE, Piscataway, NJ.
7. Maex K., Baklanov M.R., Shamiryan D., Iacopi F., Brongersma S.H., Yanovitskaya Z.S. J. Appl. Phys. 93:2003;8793.
8. Pang B., Yau W.-F., Lee P., Naik M. Semiconductor Fabtech. 10th ed. 1999;285-289 ICG, London.
9. Sze S.M. Physics of Semiconductor Devices. 2nd ed. 1981;Wiley, New York.
10. Ohring M. Reliability and Failure of Electronic Materials and Devices. 1998;305 Academic Press, New York.
11. Dissado L.A., Fothergill J.C. Electrical Degradation and Breakdown in Polymers. 1992;Peter Peregrinus, London. Chap. 9.