PECVD-based nanocrystalline-silicon TFT backplanes for large-sized AMOLED displays

Journal of the Society for Information Display

Volumn 15, Issue 2, 2007, Pages 113-118

  Girotra, Kunal S ^a   Choi, Yong Mo ^a   Kim, Byoung June ^a   Song, Young Rok ^a   Choi, Beomrak ^a   Yang, Sung Hoon ^a   Kim, Shiyul ^a   Lim, Soonkwon ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

AMOLEDs; Ellipsometry; Microcrystalline silicon; PECVD; Raman; Stability; TFT

Indexed keywords

MICROCRYSTALLINE SILICON; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOCRYSTALLINE SILICON; NANOSTRUCTURED MATERIALS; PLASMA DEPOSITION; PLASMA STABILITY; POLYSILICON; SILICON; THIN FILM TRANSISTORS;

A STABLES; AMOLED DISPLAYS; AMOLEDS; CONSTANT CURRENT STRESSES; COST ADVANTAGES; FILM CHARACTERIZATIONS; NANOCRYSTALLINE; PECVD; PECVD SYSTEMS; RAMAN; SI FILMS; TFT; TFT BACKPLANES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 43349101816     PISSN: 10710922     EISSN: None     Source Type: Journal    
DOI: 10.1889/1.2709730     Document Type: Conference Paper

References (9)

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