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Volumn 92, Issue 18, 2008, Pages

Controlling the temperature coefficient of resistance and resistivity in Ru O2 -Ti O2 thin films by the intermixing ratios between Ru O2 and Ti O2

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; RUTHENIUM COMPOUNDS; THERMAL CONDUCTIVITY; THERMODYNAMIC STABILITY; THIN FILMS; TITANIUM OXIDES;

INTERMIXING RATIOS; STRUCTURAL STABILITY; TEMPERATURE COEFFICIENT OF RESISTANCE;

HEAT RESISTANCE;

EID: 43349097919 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2918989 Document Type: Article

Times cited : (13)

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