On the ion irradiation stability of Al/Ti versus AlN/TiN multilayers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1749-1753

  Perusko D ^a   Webb, M J ^b   Milinovic V ^a   Timotijevic B ^a   Milosavljevic M ^a,b   Jeynes, C ^b   Webb, R P ^b  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

Al Ti multilayers; AlN TiN multilayers; Ion beam mixing; Irradiation stability

Indexed keywords

ALUMINUM; ARGON; ION BOMBARDMENT; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

ION BEAM MIXING; IRRADIATION STABILITY; ROOM TEMPERATURE; STRUCTURAL CHANGES;

MULTILAYERS;

EID: 43249112181     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.02.034     Document Type: Article

References (27)

1. Sproul W.D. Science 273 (1996) 889
2. Helmersson U., Todorova S., Barnett S.A., Sundgren J.-E., Markert L.C., and Greene J.E. J. Appl. Phys. 62 (1987) 481
3. Li D., Lin X.-W., Cheng S.-C., Dravid V.P., Chung Y.-W., Wong M.-S., and Sproul W.D. Appl. Phys. Lett. 68 (1996) 1211
4. PalDey S., and Deevi S.C. Mater. Sci. Eng. A 342 (2003) 58
5. Ramos A.S., Calinas R., and Vieira M.T. Surf. Coat. Technol. 200 (2006) 6196
6. Ramos A.S., Vieira M.T., Duarte L.I., Vieira M.F., Viana F., and Calinas R. Intermetallics 14 (2006) 1157
7. Gachon J.-C., Rogachev A.S., Grigoryan H.E., Illarionova E.V., Kuntz J.-J., Kovalev D.Yu., Nosyrev A.N., Sachkova N.V., and Tsygankov P.A. Acta Mater. 53 (2005) 1225
8. Wang Y.Y., Wong M.S., Chia W.J., Rechner J., and Sproul W.D. J. Vac. Sci. Technol. A 16 (1998) 3341
9. Kim D.-G., Seong T.-Y., and Baik Y.-J. Surf. Coat. Technol. 153 (2002) 79
10. Madan A., Kim I.W., Cheng S.C., Yashar P., Dravid V.P., and Barnett S.A. Phys. Rev. Lett. 78 (1997) 1743
11. Kim S.-J., Nicolet M.-A., Averback R.S., and Peak D. Phys. Rev. B 37 (1988) 38
12. Hong Q.Z., Lilienfeld D.A., and Mayer J.W. J. Appl. Phys. 64 (1988) 4478
13. Børgesen P., Lilienfeld D.A., and Johnson H.H. J. Appl. Phys. 66 (1989) 513
14. Børgesen P., Wistrom R.E., Alford T.L., Lilienfeld D.A., and Johnson H.H. Nucl. Instr. and Meth. B 43 (1989) 165
15. Larsen K.K., Skovmand S., Karpe N., Bottiger J., and Bormann R. Nucl. Instr. and Meth. B 80/81 (1993) 390
16. Johnson W.L., Cheng Y.-T., and Nicolet M.V.R.a.M.-A. Nucl. Instr. and Meth. B 7/8 (1985) 657
17. Ziegler J.F., Biersack J.P., and Littmark U. The Stopping and Range of Ions in Solids (1985), Pergamon, New York
18. Barradas N.P., Jeynes C., and Webb R.P. Appl. Phys. Lett. 71 (1997) 291
19. Szilágyi E., Pászti F., and Amsel G. Nucl. Instr. and Meth. B 100 (1995) 103
20. Ziegler J.F. Nucl. Instr. and Meth. B 219/220 (2004) 1027
21. Jeynes C., Barradas N.P., Marriott P.K., Boudreault G., Jenkin M., Wendler E., and Webb R.P. J. Phys. D Appl. Phys. 36 (2003) R97-R126
22. Bolse W. Mater. Sci. Eng. R12 (1994) 53
23. Milinović V., Bibić N., Lieb K.P., Milosavljević M., and Schrempel F. Nucl. Instr. and Meth. B 257 (2007) 605
24. Sigmund P., and Gras-Marti A. Nucl. Instr. and Meth. 182/183 (1981) 25
25. Misra A., Demkowicz M.J., Zhang X., and Hoagland R.G. JOM 59 (2007) 62
26. Höchbauer T., Misra A., Hattar K., and Hoagland R.G. J. Appl. Phys. 98 (2005) 123516
27. Bagchi S., Potdar S., Singh F., and Lalla N.P. J. Appl. Phys. 102 (2007) 074310