Focused ion beam production of nanoelectrode arrays

Materials Science and Engineering C

Volumn 28, Issue 5-6, 2008, Pages 777-780

  Errachid, A ^a   Mills, C A ^a   Pla Roca, M ^a   Lopez, M J ^a   Villanueva, G ^b   Bausells, J ^b   Crespo, E ^c   Teixidor, F ^c   Samitier, J ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

Author keywords

Cyclic voltammetry; Focused ion beam; Nanoelectrodes; Polypyrrole

Indexed keywords

CYCLIC VOLTAMMETRY; FOCUSED ION BEAMS; PASSIVATION; POLYPYRROLES; SILICON NITRIDE;

GOLD ELECTRODES; NANOELECTRODES; NANOMETRIC BIOLOGICAL SPECIMEN;

ELECTRODES;

EID: 43049143922     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2007.10.077     Document Type: Article

References (18)

1. Maruccio G., Visconti P., D'Amico S., Calogiuri P., D'Amone E., Cingolani R., and Rinaldi R. Microelectron. Eng. 67-68 (2003) 838
2. Hamilton S., Hepher M.J., and Sommerville J. Sens. Actuators, B, Chem. 107 (2005) 424
3. Ameer Q., and Adeloju S.B. Sens. Actuators, B, Chem. 106 (2005) 541
4. Montelius L., Heidari B., Graczyk M., Maximov I., Sarwe E.-L., and Ling T.G.I. Microelectron. Eng. 53 (2000) 521
5. Madou M.J. Fundamentals of microfabrication: the science of miniaturisation. 2nd edn. (2002), CRC press, New York
6. Bohler T., Grebing J., Mayer-Gindner A., Lohneysen H.H.V., and Scheer E. Nanotechnology 15 (2004) S465
7. Chen F., Qing Q., Ren L., Wu Z., and Liua Z. Appl. Phys. Lett. 86 (2005) 123105
8. Sarantopoulou E., Kollia Z., Kočevar K., Muševič I., Kobe S., Dražic G., Gogolides E., Argitis P., and Cefalas A.C. Mater. Sci. Eng., C, Biomim. Mater., Sens. Syst. 23 (2003) 995
9. Tseng A.A. J. Micromechanics Microengineering 14 (2004) R15
10. Gomila G., Casuso I., Errachid A., Ruiz O., Pajot E., Minic J., Gorojankina T., Persuy M.A., Aioun J., Salesse R., Bausells J., Villanueva G., Rius G., Hou Y., Jaffrezic N., Pennetta C., Alfinito E., Akimov V., Reggiani L., Ferrari G., Fumagalli L., Sampietro M., and Samitier J. Sens. Actuators, B, Chem. 116 (2006) 66
11. Tlili C., Hou Y., Korri-Youssoufi H., Ponsonnet L., Martelet C., Errachid A., and Jaffrezic-Renault N. Sens. Lett. 2 (2005) 1
12. Hou Y., Helali S., Zhang A., Jaffrezic-Renault N., Martelet C., Minic J., Gorojankina T., Persuy M.-A., Pajot-Augy E., Salesse R., Bessueille F., Samitier J., Errachid A., Akinov V., Reggiani L., Pennetta C., and Alfinito E. Biosens. Bioelectron. 21 (2006) 1393
13. Zine N., Bausells J., Ivorra A., Aguiló J., Zabala M., Teixidor F., Masalles C., Viñas C., and Errachid A. Sens. Actuators, B, Chem. 91 (2003) 76
14. Marques de Oliveira I.A., Vocanson F., Lamartine R., Asfari Z., Zine N., Bausells J., Teixidor F., Viñas C., Samitier J., and Errachid A. Electrochim. Acta 51 (2006) 5075
15. Marques de Oliveira I.A., Pla M., Escriche L., Casabó J., Zine N., Bausells J., Teixidor F., Viñas C., Samitier J., and Errachid A. Electrochim. Acta 51 (2006) 5070
16. Zine N., Bausells J., Vocanson F., Lamartine R., Asfari Z., Teixidor F., Crespo E., Marques de Oliveira I.A., Samitier J., and Errachid A. Mater. Sci. Eng., C, Biomim. Mater., Sens. Syst. 26 (2006) 574
17. Heinze J. Angew. Chem., Int. Ed. Engl. 32 (1993) 1268
18. Nagale M.P., and Fritsch I. Anal. Chem. 70 (1998) 2909