Electrostatically actuated micromirror for resonant cavity enhanced detectors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 711-714

  Quack, Niels ^a   Züst, Ivan ^a   Blunier, Stefan ^a   Dual, Jurg ^a   Arnold, Martin ^a   Felder, Ferdinand ^a   Rahim, Mohamed ^a   Zogg, Hans ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; ELECTROSTATIC ACTUATORS; INFRARED SPECTROSCOPY; MIRRORS;

ACTUATION VOLTAGES; MECHANICALLY STABLE; MULTISPECTRAL INFRARED; NARROWBAND DETECTORS; OPTICAL CAVITIES; RESONANT CAVITY-ENHANCED DETECTORS; SINGLE CRYSTALLINE SILICON; STANDING WAVE;

MEMS;

EID: 52249091099     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4432997     Document Type: Conference Paper

References (4)

1. Martin Arnold, Dmitry Zimin, and Hans Zogg, Resonant-cavity-enhanced photodetectors for the mid-infrared, Appl. Phys. Lett. 87, 141103, (2005).
2. M.S. Unlu, S. Strite, Resonant cavity enhanced photonic devices, J. Appl. Phys. 78, 608, (1995).
3. C. A. Musca, J. Antoszewski, K. J.Winchester, A. J. Keating, T. Nguyen, K. K. M. B. D. Silva, J. M. Dell, L. Faraone, P. Mitra, J. D. Beck, M. R. Skokan, and J. E. Robinson. Monolithic Integration of an Infrared Photon Detector With a MEMS-Based Tunable Filter. IEEE Electron Device Letters, Vol. 26, No. 12, (December 2005).
4. Ferdinand Felder, Martin Arnold, Mohamed Rahim, Christian Ebneter and Hans Zogg; Niels Quack, Stefan Blunier and Jurg Dual. EuroMBE 2007, (March 2007), submitted.