Effect of growth ambient on the structure and properties of Mg xZn1-xO thin films prepared by radio-frequency magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 41, Issue 10, 2008, Pages

  Cong, C X ^a   Yao, B ^a,b   Zhou, Q J ^a   Chen, J R ^a  

^a JILIN UNIVERSITY   (China)

^b CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; ENERGY GAP; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; PARTIAL PRESSURE;

QUARTZ SUBSTRATES; RADIO-FREQUENCY MAGNETRON SPUTTERING; STRUCTURE TRANSFORMATION;

THIN FILMS;

EID: 43049094801     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/10/105303     Document Type: Article

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