Evolution of epitaxial Ta2 O5 and Ta2 O films during thermal oxidation of epitaxial tantalum films on sapphire substrates

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 3, 2008, Pages 494-497

  Gnanarajan, S ^a   Lam, S K H ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL FILMS; MOLECULAR OXYGEN; SAPPHIRE; TEMPERATURE MEASUREMENT; THERMOOXIDATION;

EPITAXIAL TANTALUM FILMS; ORTHORHOMBIC STRUCTURE; SAPPHIRE SUBSTRATES; THERMAL OXIDATION;

TANTALUM COMPOUNDS;

EID: 42949175731     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2909971     Document Type: Article

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