Design and control of flexure based XYθzstage

Journal of Mechanical Science and Technology

Volumn 19, Issue 11, 2005, Pages 2157-2164

  Kang, Dongwoo ^a   Kim, Kihyun ^a   Choi, Youngman ^a   Gweon, Daegab ^a   Lee, Sukwon ^b   Lee, Moongoo ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Flexure; Nanotechnology; Optimal Design; Piezoelectric Actuator; Precision Stage

Indexed keywords

EID: 33244470879     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02916513     Document Type: Article

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