A stage based on voice coil motor with high speed and long range for laser micro/nano fabrication

Key Engineering Materials

Volumn 345-346 I, Issue , 2007, Pages 757-760

  Kim, Kihyun ^a   Gweon, Dae Gab ^a   Jung, Hyun Soo ^b   Lee, Soo Hun ^b   Hong, Min Sung ^b   Lee, Moon G ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Ajou University   (South Korea)

Author keywords

Laser machining; Magnetic circuit; Optimal design; Voice Coil Motor (VCM)

Indexed keywords

ACCELERATION; ACTUATORS; CONTROL SYSTEMS; FEEDBACK CONTROL; INTERFEROMETERS; LASER APPLICATIONS; SERVOMOTORS; SPEED;

LASER MACHINING; MAGNETIC CIRCUIT; VCM ACTUATORS; VOICE COIL MOTOR;

DC MOTORS;

EID: 34248598798     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-440-5.757     Document Type: Conference Paper

References (3)

1. Malcolm Gower: Proceedings of SPIE Vol. 4559 (2001) pp.53-59.
2. Information on http://www.charment.net
3. Duane C. Hanselman in: Brushless Permanent-Manget Motor Design, McGraw-Hill, New York (1994).