Erratum to "Influence of contaminations on the performance of thin-film silicon solar cells prepared after in situ reactor plasma cleaning" [Thin Solid Films 516 (2008 4639-4644)] (DOI:10.1016/j.tsf.2007.06.013);Influence of contaminations on the performance of thin-film silicon solar cells prepared after in situ reactor plasma cleaning

Thin Solid Films

Volumn 516, Issue 14, 2008, Pages 4639-4644

  Grunski, D ^a   Rech, B ^a   Schmitz, R ^a   Muck A ^a   Pincon O ^a   Breuer, U ^a   Beyer, W ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

a Si:H; Chemical memory effect (CME); Dry cleaning; PECVD; Thin film

Indexed keywords

DRY CLEANING; IMPURITIES; LIGHTING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

CHEMICAL MEMORY EFFECT (CME); IN SITU REACTOR CLEANING;

PLASMA DIAGNOSTICS;

EID: 42949118768     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.07.024     Document Type: Erratum

References (17)

1. H. Kusche M. Möller R. Plättner Proceedings of the 5th European Photovoltaic Solar Energy Conference, Athens, Greece, Oct. 17–21 1983 706
2. A. Picard G. Turban B. Grolleau J. Phys., D. Appl. Phys. 19 1986 991
3. H.K. Yasuda Q.S. Yu C.M. Reddy C.E. Miffitt D.M. Wieliczka J. Vac. Sci. Technol., A, Vac. Surf. Films 19 2001 2074
4. W. Beyer M. Lejeune J. Müller U. Zastrow M. Albert T. Röβler Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, May 11–18 2003 0_2 – XXXVI.
5. L.X. Hua L. Ling G.S. Oehrlein E. Karwacki B. Ji J. Vac. Sci. Technol., A, Vac. Surf. Films 22 2004 158
6. G. Bruno P. Capezzuto G. Cicala P. Manodoro J. Vac. Sci. Technol. A12 1994 690
7. R. Platz S. Wagner C. Hof A. Shah S. Wieder B. Rech J. Appl. Phys. 84 1998 3949
8. B. Rech T. Roschek T. Repmann J. Muller R. Schmitz W. Appenzeller Thin Solid Films 427 2003 157
9. B. Rech H. Wagner Appl. Phys., A Mater. Sci. Process. 69 Aug 1999 155
10. R. Platz D. Fischer S. Dubail A. Shah Proceedings of the 14th EC Photovoltaic Solar Energy Conference, Barcelona, Spain, June 30 1997 636
11. A. Silva L. Raniero E. Ferreira H. Aguas L. Pereira E. Fortunato R. Martins Advanced Materials Forum II vol. 422–456 2004 120
12. J.B. Chevrier E. Turlot P. Grousset F. Leblanc J.P.M. Schmitt Proceedings of the 5th Int. Display Workshops, Kobe, Japan 1998 179
13. A.A. Langford A.H. Mahan M.L. Fleet J. Bender Phys. Rev., B, Condens. Matter Mater. Phys. 41 1990 8259
14. D.E. Carlson R.W. Smith Conference Record of the 15th Institute of Electrical and Electronics Engineers Photovoltaic Specialists Conference, New York 1981 694
15. H. Wagner W. Beyer Solid State Commun. 48 1983 585
16. J.P.M. Schmitt J. Meot R. Ronbeau P. Porrens Proceedings of the 8th European Community Photovoltaic Solar Energy Conference, Florence, Italy 1988 964
17. B. Ji H.J. Yang R.P. Badowski E.J. Karwacki Proceedings of the Semicon West Symposium, paper 103-6 2003