Performance of thin film silicon MEMS on flexible plastic substrates

Sensors and Actuators, A: Physical

Volumn 144, Issue 1, 2008, Pages 201-206

  Patil, S B ^a   Chu, V ^a   Conde, J P ^a,b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

Amorphous silicon; MEMS; Plastic substrate; Resonance

Indexed keywords

AMORPHOUS SILICON; ELECTROSTATIC ACTUATORS; MICROMACHINING; NATURAL FREQUENCIES; PLASTICS; POLYETHYLENE TEREPHTHALATES; THIN FILMS;

MICROBRIDGES; PLASTIC SUBSTRATES;

MEMS;

EID: 42949086856     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.12.022     Document Type: Article

References (19)

1. Petersen K.E., and Guarnieri C.R. Young's modulus measurements of thin films using micromechanics. J. Appl. Phys. 50 (1979) 6761
2. See, for example. Elwenspoeck M., and Wiegerink R. Mechanical Microsensors (2001), Springer, Berlin
3. See, for example. Street R.A. Hydrogenated Amorphous Silicon (1991), Cambridge University Press, Cambridge
4. Boucinha M., Brogueira P., Chu V., and Conde J.P. Amorphous silicon air-gap resonators on large area substrates. Appl. Phys. Lett. 77 (2000) 907
5. Gaspar J., Chu V., Louro N., Cabeca R., and Conde J.P. Thermal actuation of thin film microelectromechanical structures. J. Non-Cryst. Solids 299-302 (2002) 1224
6. Syllaios A.J., Schimert T.R., Gooch R.W., McCarde W.L., Ritchey B.A., and Tregilgas J.H. Amorphous silicon microbolometer technology. Mater. Res. Soc. Symp. Proc. 609 (2000) A14.4.1
7. Gleskova H., Wagner S., and Suo Z. Rugged a-Si:H TFTs on plastic substrates. Mater. Res. Soc. Symp. Proc. 557 (1999) 653
8. Louro P., Vieira M., Fernandes M., and Schubert M. p-i-n flexible imaging devices with optical readout. Opt. Mater. 27 5 (2005) 1069-1073
9. Klauk H., Schmid G., Radlik W., Weber W., Zhou L., Sheraw C.D., Nichols J.A., and Jackson T.N. Contact resistance in organic thin film transistors. Solid State Electr. 47 2 (2003) 297
10. Z. Taehyoung, S.H. Kim, H.Y. Chu, J.H. Lee, S.C. Lim, L. Jeong-Ik, O. Jiyoung, Flexible electronics technology. Part I. Systems & Applications, Proceedings of the IEEE, 93 (7) (2005) 1265-1272.
11. Dayeh S.A., Butler D.P., and Celik-Butler Z. Micromachined infrared bolometers on flexible polyimide substrates. Sens. Actuators A 118 (2005) 49-56 (Erratum: Sens. Actuators A 125 (2006) 597-598)
12. Gaspar J., Chu V., and Conde J.P. Electrostatic actuation of thin-film microelectromechanical structures. J. Appl. Phys. 93 (2003) 10018
13. Gaspar J., Chu V., and Conde J.P. Electrostatically actuated thin-film amorphous silicon microbridge resonators. J. Appl. Phys. 97 (2005) 094501
14. See, for example. Weaver Jr. W., Timoshenko S.P., and Young D.H. Vibration Problems in Engineering (1990), Wiley, New York
15. See, for example. Beer F.P., and Johnston Jr. E.R. Mechanics of Materials (1992), McGraw Hill, Berkshire
16. Lee J.H., Kim T.S., and Yoon K.H. Effect of mass and stress on resonant frequency shift of functional PZT thin film microcantilever for the detection of C reactive protein. Appl. Phys. Lett. 84 16 (2004) 3187
17. Cleland A.N. Foundations of Nanomechanics-From Solid State Theory to Device Applications (2002), Springer, New York
18. Alpuim P., Chu V., and Conde J.P. Piezoresistive sensors on plastic substrates using doped microcrystalline silicon. IEEE Sens. J. 2 (2002) 336
19. Suo Z., Ma E.Y., Gleskova H., and Wagner S. Mechanics of rollable and foldable film-on-foil electronics. Appl. Phys. Lett. 74 (1999) 1177-1179