Rugged a-Si:H TFTs on plastic substrates

Materials Research Society Symposium - Proceedings

Volumn 557, Issue , 1999, Pages 653-658

  Gleskova, H ^a   Wagner, S ^a,b   Suo, Z ^a,b  

^a PRINCETON UNIVERSITY   (United States)

^b Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; BENDING (DEFORMATION); HYDROGENATION; POLYIMIDES; SEMICONDUCTOR DEVICE MANUFACTURE; STRAIN; SUBSTRATES;

BENDING STRAINS; PLASTIC SUBSTRATES; POLYIMIDE FOIL;

THIN FILM TRANSISTORS;

EID: 0033298932     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)

1. G.N. Parsons, C.S. Yang, C.B. Arthur, T.M. Klein, and L. Smith, in Fiat Panel Display Materials - 1998, edited by G.N. Parsons, C.C. Tsai, T.S. Fahlen, and C.H. Seager, (Mat. Res. Soc. Symp. Proc. 508, Pittsburgh, PA, 1998), pp. 19-24.
2. H. Gleskova, S. Wagner and Z. Suo, in Fiat Panel Display Materials -1998, edited by G.N. Parsons, C.C. Tsai, T.S. Fahlen, and C.H. Seager, (Mat. Res. Soc. Symp. Proc. 508, Pittsburgh, PA, 1998), pp. 73-78.
3. J.N. Sandoe, Digest of Technical Papers of the Society for Information Display, Vol. 29, 1998, pp. 293-296.
4. E. Lueder, M,. Muecke, S. Polach, Proc. of the Int. Display Research Conf., Asia Display 98, 1998, pp. 173-177.
5. A. Constant, S.G. Burns, H. Shanks, C. Gruber, A. Landin, D. Schmidt, C. Thielen, F. Olympic, T. Schumacher, and J. Cobbs, The Electrochemical Society Proceedings, Vol. 94-35, pp. 392-400.
6. S.G. Burns, H. Shanks, A. Constant, C. Gruber, D. Schmidt, A. Landin, and F. Olympic, The Electrochemical Society Proceedings, Vol. 96-23, pp. 382-390.
7. S. D. Theiss, P. G. Carey, P.M. Smith, P. Wickboldt, T.W. Sigmon, Y.J. Tung, and T.-J. King, IEEE Int. Electron Devices Meeting 1998, Technical Digest, pp. 257-260.
8. D.B. Thomasson, M. Bonse, J.R. Huang, C.R. Wronski, and T.N. Jackson, IEEE Int. Electron Devices Meeting 1998, Technical Digest, pp. 253-256.
9. Z. Suo, E.Y. Ma, H. Gleskova, and S. Wagner, Appl. Phys. Lett. 74,1999, pp. 1177-1179.
10. E.Y. Ma and S. Wagner, in Flat Panel Display Materials - 1998, edited by G.N. Parsons, C.C. Tsai, T.S. Fahlen, and C.H. Seager? (Mat. Res. Soc. Symp. Proc. 508, Pittsburgh, PA, 1998), pp. 13-18.