Microstructure and optical band gap control of DLC film deposited by pulsed discharge plasma CVD

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 646-649

  Noda, M ^a   Shinagawa, T ^a   Kawai, S ^b   Umeno, M ^a  

^a CHUBU UNIVERSITY   (Japan)

^b DENSO Research Laboratories   (Japan)

Author keywords

DLC film; Microstructure; Optical band gap; Pulsed discharge plasma CVD

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; GAS MIXTURES; MICROSTRUCTURE; OPTICAL BAND GAPS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PULSED LASER DEPOSITION;

DUTY RATIO; PULSED DISCHARGE PLASMA; PULSED DISCHARGE PLASMA CVD;

DIAMOND LIKE CARBON FILMS;

EID: 42749096787     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.08.018     Document Type: Article

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