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Volumn 354, Issue 19-25, 2008, Pages 2529-2533
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High-performance hydrogenated amorphous silicon TFT on flexible metal foil with polyimide planarization
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Author keywords
Atomic force and scanning tunneling microscopy; Mechanical, stress relaxation; Spin coating; Thin film transistors
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
METAL FOIL;
SCANNING TUNNELING MICROSCOPY;
SPIN COATING;
STRESS RELAXATION;
THIN FILM TRANSISTORS;
POLYIMIDE PLANARIZATION;
ROOM TEMPERATURE;
AMORPHOUS SILICON;
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EID: 42649131382
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2007.09.034 Document Type: Article |
Times cited : (16)
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References (12)
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