Via hole technology for thin-film transistor circuits

IEEE Electron Device Letters

Volumn 18, Issue 11, 1997, Pages 523-525

  Gleskova, H ^a   Wagner, S ^a   Zhang, Q ^b   Shen, D S ^b  

^a Princeton University   (United States)

^b UNIVERSITY OF ALABAMA IN HUNTSVILLE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; GATES (TRANSISTOR); LASER APPLICATIONS; LIQUID CRYSTAL DISPLAYS; SEMICONDUCTING SILICON; SUBSTRATES;

ACTIVE MATRIX LIQUID CRYSTAL DISPLAYS;

THIN FILM TRANSISTORS;

EID: 0031272055     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.641433     Document Type: Article

References (12)

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