Properties of SnO2 films fabricated using a rectangular filtered vacuum arc plasma source

Thin Solid Films

Volumn 516, Issue 15, 2008, Pages 5079-5086

  Zhitomirsky, V N ^a   Cetinorgu E ^a,b   Boxman, R L ^a   Goldsmith, S ^a  

^a TEL AVIV UNIVERSITY   (Israel)

^b CUKUROVA UNIVERSITY   (Turkey)

Author keywords

Filtered vacuum arc deposition; Optical properties; Rectangular macroparticle filter; Resistivity; SnO2 films; Thin films; Tin oxide

Indexed keywords

CATHODES; ELECTRIC CONDUCTIVITY; LITHOGRAPHY; MAGNETIC FILTERS; OPACITY; PLASMAS; REFRACTIVE INDEX; TIN OXIDES;

FILTERED VACUUM ARC DEPOSITION; RECTANGULAR MACROPARTICLE FILTER; STORAGE TIME;

THIN FILMS;

EID: 42649122951     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.02.020     Document Type: Article

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