Detailed study of surface and interface properties of μc-Si films

Journal of Non-Crystalline Solids

Volumn 354, Issue 19-25, 2008, Pages 2218-2222

  Abramov, A ^a,b   Daineka, D ^a   Djeridane, Y ^a   Roca i Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b IOFFE INSTITUTE   (Russian Federation)

Author keywords

Ellipsometry; Microcrystallinity; Nanocrystals; Porosity

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NANOCRYSTALS; POROSITY; REACTIVE ION ETCHING; SPECTROSCOPIC ELLIPSOMETRY;

ELLIPSOMETRIC SPECTRA; MICROCRYSTALLINITY;

MICROCRYSTALS;

EID: 42649103646     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.10.099     Document Type: Article

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