Nanocomposite Al2O3-ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering

Thin Solid Films

Volumn 516, Issue 15, 2008, Pages 4977-4982

  Trinh, D H ^a   Ottosson, M ^b   Collin, M ^c   Reineck, I ^c   Hultman, L ^a   Hogberg H ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

^c Sandvik Tooling   (Sweden)

Author keywords

Alumina; Electron microscopy; Magnetron sputtering; Zirconia

Indexed keywords

ALUMINA; ELECTRON MICROSCOPY; FILM GROWTH; MAGNETRON SPUTTERING; NANOCOMPOSITES; RADIOFREQUENCY SPECTROSCOPY; ZIRCONIA;

MICROSTRUCTURAL CHARACTERIZATION; MONOCLINIC ZIRCONIA; PURE ZIRCONIA; ZIRCONIA FILMS;

THIN FILMS;

EID: 42649094499     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.001     Document Type: Article

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