Mechanical polarization modulator using micro-turbo machinery for Fourier transform infrared spectroscopy

Sensors and Actuators, A: Physical

Volumn 96, Issue 2-3, 2002, Pages 215-222

  Tanaka, Shuji ^a   Hara, Motoaki ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Double modulation FT IR; Micro turbo machinery; Polarization modulator; Wire grid polarizer

Indexed keywords

INFRARED LAMPS; INTERFEROMETERS; LIGHT ABSORPTION; LIGHT MEASUREMENT; LIGHT MODULATION; LIGHT MODULATORS; LIGHT POLARIZATION; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

DOUBLE MODULATION; MICROTURBO MACHINERY; POLARIZATION MODULATOR; SILICON TURBINE ROTOR; WIRE GRID POLARIZER;

FOURIER TRANSFORM INFRARED SPECTROSCOPY;

EID: 0037186183     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00760-9     Document Type: Article

References (6)

1. Fabrication of infrared polarization modulator and infrared refrection absorption spectroscopy
2. Micro-heat engines, gas turbines, and rocket engines: The MIT micro-engine project
3. Demonstration of a micro-fabricated high-speed turbine supported on gas bearing
4. Air-turbine-driven micro-polarization modulator for Fourier transform infrared spectroscopy
5. Numerical simulation of micro-fabrication turbine flows
6. Infrared transmission polarizers by photolithography