Why perform 3D calibration for a 1D AFM measurement?

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Volumn 1, Issue , 2007, Pages 310-312

  Kuhle A ^a   Garnaes, J ^a   Dirscher, K ^a  

^a DANISH FUNDAMENTAL METROLOGY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

3D CALIBRATION; AFM;

EID: 84908259222     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. J. Garnaes, A. Kühle, L. Nielsen and F. Borsetto, "True three-dimensional calibration of closed loop scanning probe microscopes" in Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-And Nanometer Range, eds. G. Wilkening and L. Koenders, WILEY-VCH Verlag, Weinheim, Germany, 2005 ISBN 3-527-40502-X.