Towards a Guideline for SPM Calibration

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range

Volumn , Issue , 2006, Pages 171-192

  Dziomba, T ^a   Koenders, L ^a   Wilkening, G ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Calibration; Calibration of the scanner axes; Guideline for SPM calibration; Instrumentation; Methods; Nanoscale calibration standards; Standards evaluation of step height; Uncertainty of measurements; Verification of properties

Indexed keywords

EID: 84889629110     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661.ch13     Document Type: Chapter

References (21)

1. J. Garnaes, N. Kofod, A. Kühle, P. Besmens, O. Ohlson, J. B. Rasmussen, G. Wilkening, L. Koenders, W. Mirande, K. Hasche, J. Haycocks, J. Nunn, and M. Stedman, in Proceedings & Posters Xth Int'l Colloq on Surfaces, Chemnitz, Germany, edited by M. Dietsch and H. Trumpold (Shaker-Verlag, Aachen, Germany, 2000), pp. 277-287.
2. L. Koenders and G. Wilkening, Review on available calibration artefacts, in Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods, Braunschweig, Germany, PTB-F-44 (Braunschweig, 2001), pp. 50-60. An updated version of this list is also available from the authors upon request (see also http://www.ptb.de/de/org/5/51/514/index. htm
3. X. Zhao, PTB-report F-20, Wirtschaftsverlag NW, Bremerhaven, Germany, 1995.
4. T. Machleid, R. Kästner, and K.-H. Franke, Reconstruction and geometric assessment of AFM tips, these proceedings.
5. J. S. Villarrubia, Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimation, J. Res. Natl. Inst. Stand. Technol. 102, 425-454 (1997).
6. S. Czerkas, T. Dziomba, and H. Bosse, Comparison of different methods of SFM tip shape determination for various characterisation structures and types of tip, these proceedings.
7. TipCheck and NioProbe, Aurora Nano-Devices Inc., Edmonton/AB, Canada.
8. P. M. Williams, K. M. Shakesheff, M. C. Davies, D. E. Jackson, C. J. Roberts, and S. J.B. Tendler, Blind reconstruction of scanning probe image data, J. Vac. Sci. Technol. B 14, 1557-1562 (1996).
9. P. M. Williams, M. C. Davies, C. J. Roberts, and S. J.B. Tendler, Noise-compliant tip-shape derivation, Appl. Phys. A 66, S911-S914 (1998).
10. F. Meli, International comparison in the field of nanometrology, pitch of 1D grating (NANO4), 2nd Int'l. Conf. Euspen, Torino, Italy (2001), p. 358.
11. I. Misumi, S. Gonda, T. Kurosawa, and K. Takamasu, Uncertainty in pitch measurements of one-dimensional grating standard using nanometrological atomic force microscope, Meas. Sci. Technol. 14, 463 (2003).
12. J. Joergensen, J. Jensen, and J. Garnaes, Lateral metrology using scanning probe microscopes, 2D pitch standards & image processing, Appl. Phys. A 66, 847-852 (1998).
13. N. Kofod, Validation and industrial application of AFM, Ph. D. thesis, Technical University of Denmark, Lyngby, 2002.
14. T. Dziomba, W. Häßler-Grohne, H. Bosse, H.-U. Danzebrink, and G. Wilkening, Influence of nanostandard properties on calibration procedures of SPMs, in Proceedings of Euspen Int'l Topical Conference, Aachen, Germany, edited by M. Weck and H. Kunzmann (Verlag Rhiem, Voerde, Germany, 2003), pp. 491-494.
15. Scanning Probe Image Processor software (SPIP), Image Metrology AS, Lyngby, Denmark.
16. J. Garnaes et al., these proceedings.
17. T. Dziomba, L. Koenders, H.-U. Danzebrink, and G. Wilkening, Lateral & vertical calibration of scanning probe microscopes and their measurement uncertainty, in Proceeding of the XIth Int'l Colloq on Surfaces, Chemnitz, Germany, edited by M. Dietzsch (Shaker Verlag, Aachen, Germany, 2004), pp. 117-128.
18. F. Meli, Z calibration of a metrology AFM scanner using an interferometer and a filtering device together with a linear displacement stage, in Proceedings of 3rd Seminar on Quantitative Microscopy, Lyngby, Denmark, PTB-report F-34 (Wirtschaftsverlag NW, Bremerhaven, Germany, 1998), pp. 61-67.
19. H. Edwards, J. Joergensen, J. Dagata, Y. Strausser, and J. Schneir, Influence of data analysis and other factors on the short-term stability of vertical scanning probe microscope calibration measurements, J. Vac. Sci. Technol. B 16, 633-644 (1998).
20. L. Koenders et al., Comparison on nanometrology NANO2: step height, Metrologia 40, 04001 (2003).
21. Guide to the Expression of Uncertainty in Measurements (GUM), BSI, London. ISBN 0580 234827 (1995).