Self-calibration algorithm for testing out-of-plane errors of two-dimensional profiling stages

International Journal of Machine Tools and Manufacture

Volumn 44, Issue 7-8, 2004, Pages 767-774

  Yoo, Seungbong ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Artifact error; Calibration; Out of plane error motion; Profile measurement; Self calibration; Two dimensional stages

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; COST EFFECTIVENESS; ERROR ANALYSIS; INTERFEROMETERS; LINEAR EQUATIONS; MECHANICAL TESTING;

ARTIFACT ERROR; OUT-OF-PLANE ERROR MOTION; PROFILE MEASUREMENT; ROTARY SPINDLE; SELF-CALIBRATION; TWO-DIMENSIONAL STAGES;

PROFILOMETRY;

EID: 1842854073     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2004.01.017     Document Type: Article

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